JPS5759657B2 - - Google Patents

Info

Publication number
JPS5759657B2
JPS5759657B2 JP53161139A JP16113978A JPS5759657B2 JP S5759657 B2 JPS5759657 B2 JP S5759657B2 JP 53161139 A JP53161139 A JP 53161139A JP 16113978 A JP16113978 A JP 16113978A JP S5759657 B2 JPS5759657 B2 JP S5759657B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53161139A
Other languages
Japanese (ja)
Other versions
JPS5591125A (en
Inventor
Koichiro Ootori
Yasuo Tarui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP16113978A priority Critical patent/JPS5591125A/ja
Publication of JPS5591125A publication Critical patent/JPS5591125A/ja
Publication of JPS5759657B2 publication Critical patent/JPS5759657B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP16113978A 1978-12-28 1978-12-28 Pattern formation method and apparatus using charged particle beam Granted JPS5591125A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16113978A JPS5591125A (en) 1978-12-28 1978-12-28 Pattern formation method and apparatus using charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16113978A JPS5591125A (en) 1978-12-28 1978-12-28 Pattern formation method and apparatus using charged particle beam

Publications (2)

Publication Number Publication Date
JPS5591125A JPS5591125A (en) 1980-07-10
JPS5759657B2 true JPS5759657B2 (de) 1982-12-15

Family

ID=15729325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16113978A Granted JPS5591125A (en) 1978-12-28 1978-12-28 Pattern formation method and apparatus using charged particle beam

Country Status (1)

Country Link
JP (1) JPS5591125A (de)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Also Published As

Publication number Publication date
JPS5591125A (en) 1980-07-10

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