JPS5759544B2 - - Google Patents
Info
- Publication number
- JPS5759544B2 JPS5759544B2 JP4932875A JP4932875A JPS5759544B2 JP S5759544 B2 JPS5759544 B2 JP S5759544B2 JP 4932875 A JP4932875 A JP 4932875A JP 4932875 A JP4932875 A JP 4932875A JP S5759544 B2 JPS5759544 B2 JP S5759544B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4932875A JPS51124380A (en) | 1975-04-22 | 1975-04-22 | Photo mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4932875A JPS51124380A (en) | 1975-04-22 | 1975-04-22 | Photo mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51124380A JPS51124380A (en) | 1976-10-29 |
JPS5759544B2 true JPS5759544B2 (un) | 1982-12-15 |
Family
ID=12827908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4932875A Granted JPS51124380A (en) | 1975-04-22 | 1975-04-22 | Photo mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51124380A (un) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562736A (en) * | 1978-11-01 | 1980-05-12 | Toshiba Corp | Mask material for preparation of semiconductor device |
-
1975
- 1975-04-22 JP JP4932875A patent/JPS51124380A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS51124380A (en) | 1976-10-29 |