JPS5759441U - - Google Patents

Info

Publication number
JPS5759441U
JPS5759441U JP13631580U JP13631580U JPS5759441U JP S5759441 U JPS5759441 U JP S5759441U JP 13631580 U JP13631580 U JP 13631580U JP 13631580 U JP13631580 U JP 13631580U JP S5759441 U JPS5759441 U JP S5759441U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13631580U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13631580U priority Critical patent/JPS5759441U/ja
Publication of JPS5759441U publication Critical patent/JPS5759441U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13631580U 1980-09-24 1980-09-24 Pending JPS5759441U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13631580U JPS5759441U (enrdf_load_stackoverflow) 1980-09-24 1980-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13631580U JPS5759441U (enrdf_load_stackoverflow) 1980-09-24 1980-09-24

Publications (1)

Publication Number Publication Date
JPS5759441U true JPS5759441U (enrdf_load_stackoverflow) 1982-04-08

Family

ID=29496430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13631580U Pending JPS5759441U (enrdf_load_stackoverflow) 1980-09-24 1980-09-24

Country Status (1)

Country Link
JP (1) JPS5759441U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187501A (ja) * 1983-04-05 1984-10-24 佐藤　信明 粉体、粒体等の脱気定量供給装置
JP2024023223A (ja) * 2013-03-14 2024-02-21 エーエスエム・アイピー・ホールディング・ベー・フェー 低温でのＳｉＮの堆積用Ｓｉ前駆体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187501A (ja) * 1983-04-05 1984-10-24 佐藤　信明 粉体、粒体等の脱気定量供給装置
JP2024023223A (ja) * 2013-03-14 2024-02-21 エーエスエム・アイピー・ホールディング・ベー・フェー 低温でのＳｉＮの堆積用Ｓｉ前駆体

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