JPS5759438B2 - - Google Patents

Info

Publication number
JPS5759438B2
JPS5759438B2 JP47059493A JP5949372A JPS5759438B2 JP S5759438 B2 JPS5759438 B2 JP S5759438B2 JP 47059493 A JP47059493 A JP 47059493A JP 5949372 A JP5949372 A JP 5949372A JP S5759438 B2 JPS5759438 B2 JP S5759438B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47059493A
Other languages
Japanese (ja)
Other versions
JPS4921263A (en
Inventor
Hiroshi Kinoshita
Yasuo Marui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP47059493A priority Critical patent/JPS5759438B2/ja
Publication of JPS4921263A publication Critical patent/JPS4921263A/ja
Publication of JPS5759438B2 publication Critical patent/JPS5759438B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Positive-Displacement Air Blowers (AREA)
JP47059493A 1972-06-16 1972-06-16 Expired JPS5759438B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47059493A JPS5759438B2 (en) 1972-06-16 1972-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47059493A JPS5759438B2 (en) 1972-06-16 1972-06-16

Publications (2)

Publication Number Publication Date
JPS4921263A JPS4921263A (en) 1974-02-25
JPS5759438B2 true JPS5759438B2 (en) 1982-12-14

Family

ID=13114858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47059493A Expired JPS5759438B2 (en) 1972-06-16 1972-06-16

Country Status (1)

Country Link
JP (1) JPS5759438B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195046U (en) * 1985-05-27 1986-12-04
JPS629716Y2 (en) * 1981-07-23 1987-03-06
JPS63173327A (en) * 1987-01-13 1988-07-16 Nec Corp Production equipment for semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5486421B2 (en) * 2010-06-25 2014-05-07 パナソニック株式会社 Air conditioning system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629716Y2 (en) * 1981-07-23 1987-03-06
JPS61195046U (en) * 1985-05-27 1986-12-04
JPS63173327A (en) * 1987-01-13 1988-07-16 Nec Corp Production equipment for semiconductor device

Also Published As

Publication number Publication date
JPS4921263A (en) 1974-02-25

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