JPS5759438B2 - - Google Patents
Info
- Publication number
- JPS5759438B2 JPS5759438B2 JP47059493A JP5949372A JPS5759438B2 JP S5759438 B2 JPS5759438 B2 JP S5759438B2 JP 47059493 A JP47059493 A JP 47059493A JP 5949372 A JP5949372 A JP 5949372A JP S5759438 B2 JPS5759438 B2 JP S5759438B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Positive-Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47059493A JPS5759438B2 (en) | 1972-06-16 | 1972-06-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47059493A JPS5759438B2 (en) | 1972-06-16 | 1972-06-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4921263A JPS4921263A (en) | 1974-02-25 |
JPS5759438B2 true JPS5759438B2 (en) | 1982-12-14 |
Family
ID=13114858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47059493A Expired JPS5759438B2 (en) | 1972-06-16 | 1972-06-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5759438B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61195046U (en) * | 1985-05-27 | 1986-12-04 | ||
JPS629716Y2 (en) * | 1981-07-23 | 1987-03-06 | ||
JPS63173327A (en) * | 1987-01-13 | 1988-07-16 | Nec Corp | Production equipment for semiconductor device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5486421B2 (en) * | 2010-06-25 | 2014-05-07 | パナソニック株式会社 | Air conditioning system |
-
1972
- 1972-06-16 JP JP47059493A patent/JPS5759438B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS629716Y2 (en) * | 1981-07-23 | 1987-03-06 | ||
JPS61195046U (en) * | 1985-05-27 | 1986-12-04 | ||
JPS63173327A (en) * | 1987-01-13 | 1988-07-16 | Nec Corp | Production equipment for semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS4921263A (en) | 1974-02-25 |