JPS5756769B2 - - Google Patents

Info

Publication number
JPS5756769B2
JPS5756769B2 JP5190874A JP5190874A JPS5756769B2 JP S5756769 B2 JPS5756769 B2 JP S5756769B2 JP 5190874 A JP5190874 A JP 5190874A JP 5190874 A JP5190874 A JP 5190874A JP S5756769 B2 JPS5756769 B2 JP S5756769B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5190874A
Other languages
Japanese (ja)
Other versions
JPS50145077A (enrdf_load_stackoverflow
Inventor
Kimyoshi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagano Electronics Industrial Co Ltd
Original Assignee
Nagano Electronics Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagano Electronics Industrial Co Ltd filed Critical Nagano Electronics Industrial Co Ltd
Priority to JP5190874A priority Critical patent/JPS5756769B2/ja
Publication of JPS50145077A publication Critical patent/JPS50145077A/ja
Publication of JPS5756769B2 publication Critical patent/JPS5756769B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5190874A 1974-05-10 1974-05-10 Expired JPS5756769B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5190874A JPS5756769B2 (enrdf_load_stackoverflow) 1974-05-10 1974-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5190874A JPS5756769B2 (enrdf_load_stackoverflow) 1974-05-10 1974-05-10

Publications (2)

Publication Number Publication Date
JPS50145077A JPS50145077A (enrdf_load_stackoverflow) 1975-11-21
JPS5756769B2 true JPS5756769B2 (enrdf_load_stackoverflow) 1982-12-01

Family

ID=12899964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5190874A Expired JPS5756769B2 (enrdf_load_stackoverflow) 1974-05-10 1974-05-10

Country Status (1)

Country Link
JP (1) JPS5756769B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60102251U (ja) * 1983-12-14 1985-07-12 日本電気株式会社 気相成長装置
JPS60238136A (ja) * 1984-05-10 1985-11-27 Agency Of Ind Science & Technol 昇華性物質ガスの安定供給方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521193A (en) * 1978-11-24 1980-02-15 Hitachi Ltd Wafer processing device
JPS5521119A (en) * 1978-08-02 1980-02-15 Hitachi Ltd Wafer continuously processing apparatus
JPS55147773U (enrdf_load_stackoverflow) * 1979-04-11 1980-10-23
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置
JPS59200434A (ja) * 1983-04-28 1984-11-13 Hitachi Electronics Eng Co Ltd Ｃｖｄ装置の試料台の取りつけ取り外し機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60102251U (ja) * 1983-12-14 1985-07-12 日本電気株式会社 気相成長装置
JPS60238136A (ja) * 1984-05-10 1985-11-27 Agency Of Ind Science & Technol 昇華性物質ガスの安定供給方法

Also Published As

Publication number Publication date
JPS50145077A (enrdf_load_stackoverflow) 1975-11-21

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