JPS5756176B2 - - Google Patents
Info
- Publication number
- JPS5756176B2 JPS5756176B2 JP48024842A JP2484273A JPS5756176B2 JP S5756176 B2 JPS5756176 B2 JP S5756176B2 JP 48024842 A JP48024842 A JP 48024842A JP 2484273 A JP2484273 A JP 2484273A JP S5756176 B2 JPS5756176 B2 JP S5756176B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48024842A JPS5756176B2 (fr) | 1973-03-01 | 1973-03-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48024842A JPS5756176B2 (fr) | 1973-03-01 | 1973-03-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49115261A JPS49115261A (fr) | 1974-11-02 |
JPS5756176B2 true JPS5756176B2 (fr) | 1982-11-29 |
Family
ID=12149452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48024842A Expired JPS5756176B2 (fr) | 1973-03-01 | 1973-03-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5756176B2 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3333686A1 (de) * | 1983-09-17 | 1985-04-04 | Leybold-Heraeus GmbH, 5000 Köln | Elektronenstrahlkanone zum erwaermen von materialien, insbesondere zum schweissen |
JP2008226683A (ja) | 2007-03-14 | 2008-09-25 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
US11139139B2 (en) | 2018-06-28 | 2021-10-05 | Hitaclii High-Tech Corporation | Charged particle beam generator and charged particle beam apparatus |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS473666U (fr) * | 1971-02-03 | 1972-09-06 |
-
1973
- 1973-03-01 JP JP48024842A patent/JPS5756176B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS49115261A (fr) | 1974-11-02 |