JPS5755209B2 - - Google Patents

Info

Publication number
JPS5755209B2
JPS5755209B2 JP11341174A JP11341174A JPS5755209B2 JP S5755209 B2 JPS5755209 B2 JP S5755209B2 JP 11341174 A JP11341174 A JP 11341174A JP 11341174 A JP11341174 A JP 11341174A JP S5755209 B2 JPS5755209 B2 JP S5755209B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11341174A
Other languages
Japanese (ja)
Other versions
JPS5140766A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11341174A priority Critical patent/JPS5140766A/en
Publication of JPS5140766A publication Critical patent/JPS5140766A/en
Publication of JPS5755209B2 publication Critical patent/JPS5755209B2/ja
Granted legal-status Critical Current

Links

JP11341174A 1974-10-02 1974-10-02 33v zokukagobutsuhandotaino hyomenshorihoho Granted JPS5140766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11341174A JPS5140766A (en) 1974-10-02 1974-10-02 33v zokukagobutsuhandotaino hyomenshorihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11341174A JPS5140766A (en) 1974-10-02 1974-10-02 33v zokukagobutsuhandotaino hyomenshorihoho

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP3211682A Division JPS5837982B2 (en) 1982-03-01 1982-03-01 Surface treatment method for Group 3-5 compound semiconductors
JP3211582A Division JPS57210633A (en) 1982-03-01 1982-03-01 Surface treating device for 3-5 family compound semiconductor

Publications (2)

Publication Number Publication Date
JPS5140766A JPS5140766A (en) 1976-04-05
JPS5755209B2 true JPS5755209B2 (en) 1982-11-22

Family

ID=14611580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11341174A Granted JPS5140766A (en) 1974-10-02 1974-10-02 33v zokukagobutsuhandotaino hyomenshorihoho

Country Status (1)

Country Link
JP (1) JPS5140766A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0119527Y2 (en) * 1983-09-28 1989-06-06

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972732U (en) * 1982-11-04 1984-05-17 日本電気株式会社 Beam lead pellet handling equipment
JPS6184834A (en) * 1984-10-03 1986-04-30 Agency Of Ind Science & Technol Protecting method for semiconductor substrate in process
JP5998605B2 (en) * 2012-04-19 2016-09-28 富士通株式会社 Semiconductor device and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0119527Y2 (en) * 1983-09-28 1989-06-06

Also Published As

Publication number Publication date
JPS5140766A (en) 1976-04-05

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