JPS575322A - Recovering and pretreating method for semiconductor - Google Patents

Recovering and pretreating method for semiconductor

Info

Publication number
JPS575322A
JPS575322A JP7904480A JP7904480A JPS575322A JP S575322 A JPS575322 A JP S575322A JP 7904480 A JP7904480 A JP 7904480A JP 7904480 A JP7904480 A JP 7904480A JP S575322 A JPS575322 A JP S575322A
Authority
JP
Japan
Prior art keywords
chips
semiconductor
recovered
recovering
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7904480A
Other languages
Japanese (ja)
Inventor
Hachiro Ikegami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP7904480A priority Critical patent/JPS575322A/en
Publication of JPS575322A publication Critical patent/JPS575322A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Processing Of Solid Wastes (AREA)

Abstract

PURPOSE:To effectively utilize recovered chips of Si, lithium tantalate or lithium niobate by treating with supersonic wave the chips in a solution capable of dissolving the chips, removing the impurities, and recovering as semiconductor chips being less contaminated. CONSTITUTION:Since impurities 1 of contamination source and scar or crack 3 are concentrated on the surface 2 when powder chips produced in cutting and polishing Si, lithium tantalate, or lithium niobate are recovered, the recovered chips are treated with supersonic wave having 10-60kHz in a solution capable of dissolving the chips, e.g., hydrofluoric acid or a mixture solution of hydrofluoric acid and other strong acid. Thus, the quantity of semiconductor loss is reduced to effectively recover the semiconductor chips.
JP7904480A 1980-06-13 1980-06-13 Recovering and pretreating method for semiconductor Pending JPS575322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7904480A JPS575322A (en) 1980-06-13 1980-06-13 Recovering and pretreating method for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7904480A JPS575322A (en) 1980-06-13 1980-06-13 Recovering and pretreating method for semiconductor

Publications (1)

Publication Number Publication Date
JPS575322A true JPS575322A (en) 1982-01-12

Family

ID=13678900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7904480A Pending JPS575322A (en) 1980-06-13 1980-06-13 Recovering and pretreating method for semiconductor

Country Status (1)

Country Link
JP (1) JPS575322A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5188906A (en) * 1988-11-10 1993-02-23 Martin Marietta Energy Systems, Inc. Substrates suitable for deposition of superconducting thin films

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911793A (en) * 1972-05-10 1974-02-01
JPS5030578A (en) * 1972-06-08 1975-03-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911793A (en) * 1972-05-10 1974-02-01
JPS5030578A (en) * 1972-06-08 1975-03-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5188906A (en) * 1988-11-10 1993-02-23 Martin Marietta Energy Systems, Inc. Substrates suitable for deposition of superconducting thin films

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