JPS5752859Y2 - - Google Patents
Info
- Publication number
- JPS5752859Y2 JPS5752859Y2 JP1976111658U JP11165876U JPS5752859Y2 JP S5752859 Y2 JPS5752859 Y2 JP S5752859Y2 JP 1976111658 U JP1976111658 U JP 1976111658U JP 11165876 U JP11165876 U JP 11165876U JP S5752859 Y2 JPS5752859 Y2 JP S5752859Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976111658U JPS5752859Y2 (en:Method) | 1976-08-20 | 1976-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976111658U JPS5752859Y2 (en:Method) | 1976-08-20 | 1976-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5329392U JPS5329392U (en:Method) | 1978-03-13 |
| JPS5752859Y2 true JPS5752859Y2 (en:Method) | 1982-11-16 |
Family
ID=28721464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976111658U Expired JPS5752859Y2 (en:Method) | 1976-08-20 | 1976-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5752859Y2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6111132A (ja) * | 1984-06-26 | 1986-01-18 | Kokusai Electric Co Ltd | 真空装置 |
| JP6054728B2 (ja) * | 2012-12-10 | 2016-12-27 | 日本電子株式会社 | 試料位置決め装置および荷電粒子線装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4851578A (en:Method) * | 1971-10-29 | 1973-07-19 |
-
1976
- 1976-08-20 JP JP1976111658U patent/JPS5752859Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5329392U (en:Method) | 1978-03-13 |