JPS5752704B2 - - Google Patents

Info

Publication number
JPS5752704B2
JPS5752704B2 JP50043507A JP4350775A JPS5752704B2 JP S5752704 B2 JPS5752704 B2 JP S5752704B2 JP 50043507 A JP50043507 A JP 50043507A JP 4350775 A JP4350775 A JP 4350775A JP S5752704 B2 JPS5752704 B2 JP S5752704B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50043507A
Other languages
Japanese (ja)
Other versions
JPS51119497A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50043507A priority Critical patent/JPS51119497A/ja
Publication of JPS51119497A publication Critical patent/JPS51119497A/ja
Publication of JPS5752704B2 publication Critical patent/JPS5752704B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP50043507A 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector Granted JPS51119497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50043507A JPS51119497A (en) 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50043507A JPS51119497A (en) 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector

Publications (2)

Publication Number Publication Date
JPS51119497A JPS51119497A (en) 1976-10-20
JPS5752704B2 true JPS5752704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-11-09

Family

ID=12665634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50043507A Granted JPS51119497A (en) 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector

Country Status (1)

Country Link
JP (1) JPS51119497A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577135A (en) * 1978-12-05 1980-06-10 Nec Kyushu Ltd Monitoring for ion beam

Also Published As

Publication number Publication date
JPS51119497A (en) 1976-10-20

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