JPS51119497A - Monitoring system of charge particle beam projector - Google Patents

Monitoring system of charge particle beam projector

Info

Publication number
JPS51119497A
JPS51119497A JP50043507A JP4350775A JPS51119497A JP S51119497 A JPS51119497 A JP S51119497A JP 50043507 A JP50043507 A JP 50043507A JP 4350775 A JP4350775 A JP 4350775A JP S51119497 A JPS51119497 A JP S51119497A
Authority
JP
Japan
Prior art keywords
particle beam
monitoring system
charge particle
beam projector
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50043507A
Other languages
Japanese (ja)
Other versions
JPS5752704B2 (en
Inventor
Katsuhiro Tsukamoto
Hiroichi Sato
Yoichi Akasaka
Kazuo Horie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50043507A priority Critical patent/JPS51119497A/en
Publication of JPS51119497A publication Critical patent/JPS51119497A/en
Publication of JPS5752704B2 publication Critical patent/JPS5752704B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: A monitoring system of charge particle beam projector that is designed to delineate brightness modulation of oscilloscope by electric current of charge particle beam.
COPYRIGHT: (C)1976,JPO&Japio
JP50043507A 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector Granted JPS51119497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50043507A JPS51119497A (en) 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50043507A JPS51119497A (en) 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector

Publications (2)

Publication Number Publication Date
JPS51119497A true JPS51119497A (en) 1976-10-20
JPS5752704B2 JPS5752704B2 (en) 1982-11-09

Family

ID=12665634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50043507A Granted JPS51119497A (en) 1975-04-09 1975-04-09 Monitoring system of charge particle beam projector

Country Status (1)

Country Link
JP (1) JPS51119497A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577135A (en) * 1978-12-05 1980-06-10 Nec Kyushu Ltd Monitoring for ion beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577135A (en) * 1978-12-05 1980-06-10 Nec Kyushu Ltd Monitoring for ion beam

Also Published As

Publication number Publication date
JPS5752704B2 (en) 1982-11-09

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