JPS5752565U - - Google Patents

Info

Publication number
JPS5752565U
JPS5752565U JP12925380U JP12925380U JPS5752565U JP S5752565 U JPS5752565 U JP S5752565U JP 12925380 U JP12925380 U JP 12925380U JP 12925380 U JP12925380 U JP 12925380U JP S5752565 U JPS5752565 U JP S5752565U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12925380U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12925380U priority Critical patent/JPS5752565U/ja
Publication of JPS5752565U publication Critical patent/JPS5752565U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP12925380U 1980-09-12 1980-09-12 Pending JPS5752565U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12925380U JPS5752565U (enrdf_load_stackoverflow) 1980-09-12 1980-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12925380U JPS5752565U (enrdf_load_stackoverflow) 1980-09-12 1980-09-12

Publications (1)

Publication Number Publication Date
JPS5752565U true JPS5752565U (enrdf_load_stackoverflow) 1982-03-26

Family

ID=29489614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12925380U Pending JPS5752565U (enrdf_load_stackoverflow) 1980-09-12 1980-09-12

Country Status (1)

Country Link
JP (1) JPS5752565U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6063918A (ja) * 1983-09-17 1985-04-12 Anelva Corp 分子線源用セル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6063918A (ja) * 1983-09-17 1985-04-12 Anelva Corp 分子線源用セル

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