JPS5751941B2 - - Google Patents
Info
- Publication number
- JPS5751941B2 JPS5751941B2 JP4383876A JP4383876A JPS5751941B2 JP S5751941 B2 JPS5751941 B2 JP S5751941B2 JP 4383876 A JP4383876 A JP 4383876A JP 4383876 A JP4383876 A JP 4383876A JP S5751941 B2 JPS5751941 B2 JP S5751941B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4383876A JPS52127063A (en) | 1976-04-16 | 1976-04-16 | Production of semiconductor ic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4383876A JPS52127063A (en) | 1976-04-16 | 1976-04-16 | Production of semiconductor ic device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52127063A JPS52127063A (en) | 1977-10-25 |
| JPS5751941B2 true JPS5751941B2 (da) | 1982-11-05 |
Family
ID=12674874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4383876A Granted JPS52127063A (en) | 1976-04-16 | 1976-04-16 | Production of semiconductor ic device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52127063A (da) |
-
1976
- 1976-04-16 JP JP4383876A patent/JPS52127063A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52127063A (en) | 1977-10-25 |