JPS5751922B2 - - Google Patents
Info
- Publication number
- JPS5751922B2 JPS5751922B2 JP14271475A JP14271475A JPS5751922B2 JP S5751922 B2 JPS5751922 B2 JP S5751922B2 JP 14271475 A JP14271475 A JP 14271475A JP 14271475 A JP14271475 A JP 14271475A JP S5751922 B2 JPS5751922 B2 JP S5751922B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14271475A JPS5265664A (en) | 1975-11-26 | 1975-11-26 | Selective introduction of impurity in compound semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14271475A JPS5265664A (en) | 1975-11-26 | 1975-11-26 | Selective introduction of impurity in compound semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5265664A JPS5265664A (en) | 1977-05-31 |
| JPS5751922B2 true JPS5751922B2 (en:Method) | 1982-11-05 |
Family
ID=15321856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14271475A Granted JPS5265664A (en) | 1975-11-26 | 1975-11-26 | Selective introduction of impurity in compound semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5265664A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5595322A (en) * | 1979-01-12 | 1980-07-19 | Nec Corp | Diffusing method of impurity |
| JPS55105380A (en) * | 1979-02-07 | 1980-08-12 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| US4843033A (en) * | 1985-09-27 | 1989-06-27 | Texas Instruments Incorporated | Method for outdiffusion of zinc into III-V substrates using zinc tungsten silicide as dopant source |
-
1975
- 1975-11-26 JP JP14271475A patent/JPS5265664A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5265664A (en) | 1977-05-31 |