JPS5751727B2 - - Google Patents

Info

Publication number
JPS5751727B2
JPS5751727B2 JP48088438A JP8843873A JPS5751727B2 JP S5751727 B2 JPS5751727 B2 JP S5751727B2 JP 48088438 A JP48088438 A JP 48088438A JP 8843873 A JP8843873 A JP 8843873A JP S5751727 B2 JPS5751727 B2 JP S5751727B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48088438A
Other versions
JPS5039055A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48088438A priority Critical patent/JPS5751727B2/ja
Publication of JPS5039055A publication Critical patent/JPS5039055A/ja
Publication of JPS5751727B2 publication Critical patent/JPS5751727B2/ja
Expired legal-status Critical Current

Links

JP48088438A 1973-08-08 1973-08-08 Expired JPS5751727B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48088438A JPS5751727B2 (ja) 1973-08-08 1973-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48088438A JPS5751727B2 (ja) 1973-08-08 1973-08-08

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2430481A Division JPS56138919A (en) 1981-02-23 1981-02-23 Device for impurity deposition against semiconductor wafer
JP2430581A Division JPS56139126A (en) 1981-02-23 1981-02-23 Apparatus for vacuum treatment

Publications (2)

Publication Number Publication Date
JPS5039055A JPS5039055A (ja) 1975-04-10
JPS5751727B2 true JPS5751727B2 (ja) 1982-11-04

Family

ID=13942789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48088438A Expired JPS5751727B2 (ja) 1973-08-08 1973-08-08

Country Status (1)

Country Link
JP (1) JPS5751727B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5361272A (en) * 1976-11-15 1978-06-01 Hitachi Ltd Boron impurity high concentration diffusion method to semiconductor
US4541906A (en) * 1984-05-21 1985-09-17 Omi International Corporation Zinc electroplating and baths therefore containing carrier brighteners

Also Published As

Publication number Publication date
JPS5039055A (ja) 1975-04-10

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