JPS5751727B2 - - Google Patents
Info
- Publication number
- JPS5751727B2 JPS5751727B2 JP48088438A JP8843873A JPS5751727B2 JP S5751727 B2 JPS5751727 B2 JP S5751727B2 JP 48088438 A JP48088438 A JP 48088438A JP 8843873 A JP8843873 A JP 8843873A JP S5751727 B2 JPS5751727 B2 JP S5751727B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48088438A JPS5751727B2 (ja) | 1973-08-08 | 1973-08-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48088438A JPS5751727B2 (ja) | 1973-08-08 | 1973-08-08 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2430481A Division JPS56138919A (en) | 1981-02-23 | 1981-02-23 | Device for impurity deposition against semiconductor wafer |
JP2430581A Division JPS56139126A (en) | 1981-02-23 | 1981-02-23 | Apparatus for vacuum treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5039055A JPS5039055A (ja) | 1975-04-10 |
JPS5751727B2 true JPS5751727B2 (ja) | 1982-11-04 |
Family
ID=13942789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48088438A Expired JPS5751727B2 (ja) | 1973-08-08 | 1973-08-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5751727B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5361272A (en) * | 1976-11-15 | 1978-06-01 | Hitachi Ltd | Boron impurity high concentration diffusion method to semiconductor |
US4541906A (en) * | 1984-05-21 | 1985-09-17 | Omi International Corporation | Zinc electroplating and baths therefore containing carrier brighteners |
-
1973
- 1973-08-08 JP JP48088438A patent/JPS5751727B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5039055A (ja) | 1975-04-10 |