JPS5751639U - - Google Patents
Info
- Publication number
- JPS5751639U JPS5751639U JP12890680U JP12890680U JPS5751639U JP S5751639 U JPS5751639 U JP S5751639U JP 12890680 U JP12890680 U JP 12890680U JP 12890680 U JP12890680 U JP 12890680U JP S5751639 U JPS5751639 U JP S5751639U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12890680U JPS5751639U (en) | 1980-09-09 | 1980-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12890680U JPS5751639U (en) | 1980-09-09 | 1980-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5751639U true JPS5751639U (en) | 1982-03-25 |
Family
ID=29489270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12890680U Pending JPS5751639U (en) | 1980-09-09 | 1980-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5751639U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114223A (en) * | 1990-04-16 | 1991-05-15 | Shinetsu Sekiei Kk | Retaining jig for quartz glass wafer boat |
| JPH0851083A (en) * | 1995-05-29 | 1996-02-20 | Shinetsu Quartz Prod Co Ltd | Vertical thermal treatment oven |
| JPH1053498A (en) * | 1996-08-07 | 1998-02-24 | Yamagata Shinetsu Sekiei:Kk | Reaction vessel for semiconductor wafer and heat-treating apparatus using the vessel |
| JP2015133405A (en) * | 2014-01-14 | 2015-07-23 | 日立金属株式会社 | Semiconductor manufacturing apparatus |
-
1980
- 1980-09-09 JP JP12890680U patent/JPS5751639U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114223A (en) * | 1990-04-16 | 1991-05-15 | Shinetsu Sekiei Kk | Retaining jig for quartz glass wafer boat |
| JPH0851083A (en) * | 1995-05-29 | 1996-02-20 | Shinetsu Quartz Prod Co Ltd | Vertical thermal treatment oven |
| JPH1053498A (en) * | 1996-08-07 | 1998-02-24 | Yamagata Shinetsu Sekiei:Kk | Reaction vessel for semiconductor wafer and heat-treating apparatus using the vessel |
| JP2015133405A (en) * | 2014-01-14 | 2015-07-23 | 日立金属株式会社 | Semiconductor manufacturing apparatus |