JPS5751258B2 - - Google Patents
Info
- Publication number
- JPS5751258B2 JPS5751258B2 JP48069976A JP6997673A JPS5751258B2 JP S5751258 B2 JPS5751258 B2 JP S5751258B2 JP 48069976 A JP48069976 A JP 48069976A JP 6997673 A JP6997673 A JP 6997673A JP S5751258 B2 JPS5751258 B2 JP S5751258B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
- G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26835572A | 1972-07-03 | 1972-07-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4952979A JPS4952979A (en:Method) | 1974-05-23 |
| JPS5751258B2 true JPS5751258B2 (en:Method) | 1982-11-01 |
Family
ID=23022609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48069976A Expired JPS5751258B2 (en:Method) | 1972-07-03 | 1973-06-22 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3767304A (en:Method) |
| JP (1) | JPS5751258B2 (en:Method) |
| DE (1) | DE2330515C2 (en:Method) |
| FR (1) | FR2191735A5 (en:Method) |
| GB (1) | GB1413723A (en:Method) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3999865A (en) * | 1974-12-09 | 1976-12-28 | The United States Of America As Represented By The Secretary Of The Air Force | Method and apparatus for determining the mechanism responsible for laser-induced damage |
| JPS5483371A (en) * | 1977-12-16 | 1979-07-03 | Fujitsu Ltd | Measurement method of impurity concentration of semiconductor |
| US4238686A (en) * | 1979-09-05 | 1980-12-09 | Bell Telephone Laboratories, Incorporated | Method of analyzing localized nonuniformities in luminescing materials |
| JPH0641910B2 (ja) * | 1988-03-04 | 1994-06-01 | 三井金属鉱業株式会社 | 比抵抗の分散の測定方法 |
| US5126569A (en) * | 1989-03-10 | 1992-06-30 | Massachusetts Institute Of Technology | Apparatus for measuring optical properties of materials |
| DE69232432T2 (de) * | 1991-11-20 | 2002-07-18 | Canon K.K., Tokio/Tokyo | Verfahren zur Herstellung einer Halbleiteranordnung |
| US5981949A (en) * | 1996-01-18 | 1999-11-09 | The United States Of America As Represented By The Secretary Of The Air Force | Locating defects in solid material |
| US20020170897A1 (en) * | 2001-05-21 | 2002-11-21 | Hall Frank L. | Methods for preparing ball grid array substrates via use of a laser |
| DE102005061834B4 (de) | 2005-12-23 | 2007-11-08 | Ioss Intelligente Optische Sensoren & Systeme Gmbh | Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche |
| MY180533A (en) * | 2014-03-17 | 2020-12-01 | Shinetsu Chemical Co | Methods for working synthetic quartz glass substrate having a mirror-like surface and method for sensing synthetic quartz glass substrate |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL259237A (en:Method) * | 1959-12-24 | |||
| US3297873A (en) * | 1963-12-30 | 1967-01-10 | Avco Corp | Microscope system with means for viewing the entire image and means for measuring radiation from a selected segment of image |
| US3405270A (en) * | 1965-08-06 | 1968-10-08 | Western Electric Co | Internal flaw detection using collimated beams |
| US3465150A (en) * | 1967-06-15 | 1969-09-02 | Frances Hugle | Method of aligning semiconductors |
-
1972
- 1972-07-03 US US00268355A patent/US3767304A/en not_active Expired - Lifetime
-
1973
- 1973-06-13 FR FR7322358A patent/FR2191735A5/fr not_active Expired
- 1973-06-15 DE DE2330515A patent/DE2330515C2/de not_active Expired
- 1973-06-22 JP JP48069976A patent/JPS5751258B2/ja not_active Expired
- 1973-06-29 GB GB3100773A patent/GB1413723A/en not_active Expired
Non-Patent Citations (2)
| Title |
|---|
| IBM TECHNICAL DISCLOSURE BULLETIN * |
| JOURNAL OF APPLIED PHYSICS * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2191735A5 (en:Method) | 1974-02-01 |
| US3767304A (en) | 1973-10-23 |
| GB1413723A (en) | 1975-11-12 |
| DE2330515A1 (de) | 1974-01-31 |
| DE2330515C2 (de) | 1983-01-27 |
| JPS4952979A (en:Method) | 1974-05-23 |