JPS575050B2 - - Google Patents

Info

Publication number
JPS575050B2
JPS575050B2 JP5652879A JP5652879A JPS575050B2 JP S575050 B2 JPS575050 B2 JP S575050B2 JP 5652879 A JP5652879 A JP 5652879A JP 5652879 A JP5652879 A JP 5652879A JP S575050 B2 JPS575050 B2 JP S575050B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5652879A
Other versions
JPS55148418A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5652879A priority Critical patent/JPS55148418A/ja
Publication of JPS55148418A publication Critical patent/JPS55148418A/ja
Publication of JPS575050B2 publication Critical patent/JPS575050B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45187—Printer
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49157—Limitation, collision, interference, forbidden zones, avoid obstacles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5652879A 1979-05-09 1979-05-09 Formation of molecular beam epitaxial growth layer on semicondcutor substrate Granted JPS55148418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5652879A JPS55148418A (en) 1979-05-09 1979-05-09 Formation of molecular beam epitaxial growth layer on semicondcutor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5652879A JPS55148418A (en) 1979-05-09 1979-05-09 Formation of molecular beam epitaxial growth layer on semicondcutor substrate

Publications (2)

Publication Number Publication Date
JPS55148418A JPS55148418A (en) 1980-11-19
JPS575050B2 true JPS575050B2 (ja) 1982-01-28

Family

ID=13029596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5652879A Granted JPS55148418A (en) 1979-05-09 1979-05-09 Formation of molecular beam epitaxial growth layer on semicondcutor substrate

Country Status (1)

Country Link
JP (1) JPS55148418A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0327007B2 (ja) * 1986-03-19 1991-04-12 Meiwa Sangyo
WO1995034093A1 (fr) * 1994-06-09 1995-12-14 Sony Corporation Procede de formation d'un film semi-conducteur fait d'un compose des groupes ii et vi dope a l'azote

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119193A (ja) * 1985-11-15 1987-05-30 Matsushita Electric Ind Co Ltd 半導体の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
J.APPL.PHYS *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0327007B2 (ja) * 1986-03-19 1991-04-12 Meiwa Sangyo
WO1995034093A1 (fr) * 1994-06-09 1995-12-14 Sony Corporation Procede de formation d'un film semi-conducteur fait d'un compose des groupes ii et vi dope a l'azote

Also Published As

Publication number Publication date
JPS55148418A (en) 1980-11-19

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