JPS5750433B2 - - Google Patents
Info
- Publication number
- JPS5750433B2 JPS5750433B2 JP51117830A JP11783076A JPS5750433B2 JP S5750433 B2 JPS5750433 B2 JP S5750433B2 JP 51117830 A JP51117830 A JP 51117830A JP 11783076 A JP11783076 A JP 11783076A JP S5750433 B2 JPS5750433 B2 JP S5750433B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11783076A JPS5342563A (en) | 1976-09-29 | 1976-09-29 | Rotary stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11783076A JPS5342563A (en) | 1976-09-29 | 1976-09-29 | Rotary stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5342563A JPS5342563A (en) | 1978-04-18 |
| JPS5750433B2 true JPS5750433B2 (bg) | 1982-10-27 |
Family
ID=14721294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11783076A Granted JPS5342563A (en) | 1976-09-29 | 1976-09-29 | Rotary stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5342563A (bg) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5387683A (en) * | 1977-01-12 | 1978-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Assembling method of electrostrictive element |
| JPS55131284A (en) * | 1979-03-28 | 1980-10-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Position controller |
| JPS58159895U (ja) * | 1982-04-17 | 1983-10-25 | 株式会社トーキン | 圧電型微少回転変位素子 |
| JPS62220893A (ja) * | 1986-03-24 | 1987-09-29 | 株式会社東芝 | 微小回転装置 |
-
1976
- 1976-09-29 JP JP11783076A patent/JPS5342563A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5342563A (en) | 1978-04-18 |