JPS5342563A - Rotary stage - Google Patents

Rotary stage

Info

Publication number
JPS5342563A
JPS5342563A JP11783076A JP11783076A JPS5342563A JP S5342563 A JPS5342563 A JP S5342563A JP 11783076 A JP11783076 A JP 11783076A JP 11783076 A JP11783076 A JP 11783076A JP S5342563 A JPS5342563 A JP S5342563A
Authority
JP
Japan
Prior art keywords
rotary stage
piezoelectric elements
exerted
plural
fitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11783076A
Other languages
Japanese (ja)
Other versions
JPS5750433B2 (en
Inventor
Kazuo Tamamushi
Kazuo Yokoi
Kaoru Isaka
Naoji Otsuka
Tadao Saito
Nobuyuki Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP11783076A priority Critical patent/JPS5342563A/en
Publication of JPS5342563A publication Critical patent/JPS5342563A/en
Publication of JPS5750433B2 publication Critical patent/JPS5750433B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prevent undue stress from being exerted to piezoelectric elements by beforehand providing protrusions or steel balls to the ends of plural bimorph type piezoelectric elements whose one ends are fixed to central fixing part and fixing U-shaped metal fittings which slide by fitting thereto to the periphery of a rotary stage by being aligned to the variation positions of the piezoelectric element ends.
COPYRIGHT: (C)1978,JPO&Japio
JP11783076A 1976-09-29 1976-09-29 Rotary stage Granted JPS5342563A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11783076A JPS5342563A (en) 1976-09-29 1976-09-29 Rotary stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11783076A JPS5342563A (en) 1976-09-29 1976-09-29 Rotary stage

Publications (2)

Publication Number Publication Date
JPS5342563A true JPS5342563A (en) 1978-04-18
JPS5750433B2 JPS5750433B2 (en) 1982-10-27

Family

ID=14721294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11783076A Granted JPS5342563A (en) 1976-09-29 1976-09-29 Rotary stage

Country Status (1)

Country Link
JP (1) JPS5342563A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5387683A (en) * 1977-01-12 1978-08-02 Nippon Telegr & Teleph Corp <Ntt> Assembling method of electrostrictive element
JPS55131284A (en) * 1979-03-28 1980-10-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Position controller
JPS58159895U (en) * 1982-04-17 1983-10-25 株式会社トーキン Piezoelectric minute rotational displacement element
JPS62220893A (en) * 1986-03-24 1987-09-29 株式会社東芝 Minute turning gear

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5387683A (en) * 1977-01-12 1978-08-02 Nippon Telegr & Teleph Corp <Ntt> Assembling method of electrostrictive element
JPS55131284A (en) * 1979-03-28 1980-10-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Position controller
JPS58159895U (en) * 1982-04-17 1983-10-25 株式会社トーキン Piezoelectric minute rotational displacement element
JPS62220893A (en) * 1986-03-24 1987-09-29 株式会社東芝 Minute turning gear

Also Published As

Publication number Publication date
JPS5750433B2 (en) 1982-10-27

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