JPS57501351A - - Google Patents
Info
- Publication number
- JPS57501351A JPS57501351A JP50229880A JP50229880A JPS57501351A JP S57501351 A JPS57501351 A JP S57501351A JP 50229880 A JP50229880 A JP 50229880A JP 50229880 A JP50229880 A JP 50229880A JP S57501351 A JPS57501351 A JP S57501351A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/SU1980/000152 WO1982000920A1 (en) | 1980-09-01 | 1980-09-01 | Electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57501351A true JPS57501351A (ja) | 1982-07-29 |
Family
ID=21616663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50229880A Pending JPS57501351A (ja) | 1980-09-01 | 1980-09-01 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS57501351A (ja) |
| DE (1) | DE3050554A1 (ja) |
| WO (1) | WO1982000920A1 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5420601B2 (ja) | 2011-07-25 | 2014-02-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1927410B2 (de) * | 1969-05-28 | 1972-03-30 | Siemens AG, 1000 Berlin u 8000 München | Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen |
| DE2540595A1 (de) * | 1975-09-09 | 1977-03-10 | Siemens Ag | Korpuskularstrahlmikroskop, insbesondere elektronenmikroskop |
-
1980
- 1980-09-01 DE DE19803050554 patent/DE3050554A1/de not_active Withdrawn
- 1980-09-01 JP JP50229880A patent/JPS57501351A/ja active Pending
- 1980-09-01 WO PCT/SU1980/000152 patent/WO1982000920A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| DE3050554A1 (de) | 1982-09-23 |
| WO1982000920A1 (en) | 1982-03-18 |