JPS5747272U - - Google Patents
Info
- Publication number
- JPS5747272U JPS5747272U JP12219280U JP12219280U JPS5747272U JP S5747272 U JPS5747272 U JP S5747272U JP 12219280 U JP12219280 U JP 12219280U JP 12219280 U JP12219280 U JP 12219280U JP S5747272 U JPS5747272 U JP S5747272U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12219280U JPS6031817Y2 (ja) | 1980-08-28 | 1980-08-28 | 被膜回転塗布装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12219280U JPS6031817Y2 (ja) | 1980-08-28 | 1980-08-28 | 被膜回転塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5747272U true JPS5747272U (ja) | 1982-03-16 |
JPS6031817Y2 JPS6031817Y2 (ja) | 1985-09-24 |
Family
ID=29482818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12219280U Expired JPS6031817Y2 (ja) | 1980-08-28 | 1980-08-28 | 被膜回転塗布装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6031817Y2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09129712A (ja) * | 1996-07-29 | 1997-05-16 | Canon Inc | 半導体製造装置 |
JP2005246228A (ja) * | 2004-03-03 | 2005-09-15 | Dainippon Printing Co Ltd | スピンコータ装置及びスピンコート方法 |
-
1980
- 1980-08-28 JP JP12219280U patent/JPS6031817Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09129712A (ja) * | 1996-07-29 | 1997-05-16 | Canon Inc | 半導体製造装置 |
JP2005246228A (ja) * | 2004-03-03 | 2005-09-15 | Dainippon Printing Co Ltd | スピンコータ装置及びスピンコート方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6031817Y2 (ja) | 1985-09-24 |