JPS5747272U - - Google Patents

Info

Publication number
JPS5747272U
JPS5747272U JP12219280U JP12219280U JPS5747272U JP S5747272 U JPS5747272 U JP S5747272U JP 12219280 U JP12219280 U JP 12219280U JP 12219280 U JP12219280 U JP 12219280U JP S5747272 U JPS5747272 U JP S5747272U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12219280U
Other versions
JPS6031817Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12219280U priority Critical patent/JPS6031817Y2/ja
Publication of JPS5747272U publication Critical patent/JPS5747272U/ja
Application granted granted Critical
Publication of JPS6031817Y2 publication Critical patent/JPS6031817Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP12219280U 1980-08-28 1980-08-28 被膜回転塗布装置 Expired JPS6031817Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12219280U JPS6031817Y2 (ja) 1980-08-28 1980-08-28 被膜回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12219280U JPS6031817Y2 (ja) 1980-08-28 1980-08-28 被膜回転塗布装置

Publications (2)

Publication Number Publication Date
JPS5747272U true JPS5747272U (ja) 1982-03-16
JPS6031817Y2 JPS6031817Y2 (ja) 1985-09-24

Family

ID=29482818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12219280U Expired JPS6031817Y2 (ja) 1980-08-28 1980-08-28 被膜回転塗布装置

Country Status (1)

Country Link
JP (1) JPS6031817Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129712A (ja) * 1996-07-29 1997-05-16 Canon Inc 半導体製造装置
JP2005246228A (ja) * 2004-03-03 2005-09-15 Dainippon Printing Co Ltd スピンコータ装置及びスピンコート方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129712A (ja) * 1996-07-29 1997-05-16 Canon Inc 半導体製造装置
JP2005246228A (ja) * 2004-03-03 2005-09-15 Dainippon Printing Co Ltd スピンコータ装置及びスピンコート方法

Also Published As

Publication number Publication date
JPS6031817Y2 (ja) 1985-09-24

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