JPS5745466B2 - - Google Patents
Info
- Publication number
- JPS5745466B2 JPS5745466B2 JP7737178A JP7737178A JPS5745466B2 JP S5745466 B2 JPS5745466 B2 JP S5745466B2 JP 7737178 A JP7737178 A JP 7737178A JP 7737178 A JP7737178 A JP 7737178A JP S5745466 B2 JPS5745466 B2 JP S5745466B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7737178A JPS556434A (en) | 1978-06-28 | 1978-06-28 | Sputtering apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7737178A JPS556434A (en) | 1978-06-28 | 1978-06-28 | Sputtering apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS556434A JPS556434A (en) | 1980-01-17 |
| JPS5745466B2 true JPS5745466B2 (US06330241-20011211-M00004.png) | 1982-09-28 |
Family
ID=13632032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7737178A Granted JPS556434A (en) | 1978-06-28 | 1978-06-28 | Sputtering apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS556434A (US06330241-20011211-M00004.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH032441Y2 (US06330241-20011211-M00004.png) * | 1984-02-20 | 1991-01-23 | ||
| JPH032440Y2 (US06330241-20011211-M00004.png) * | 1984-02-20 | 1991-01-23 | ||
| JPH0347958Y2 (US06330241-20011211-M00004.png) * | 1984-02-20 | 1991-10-14 | ||
| JPH0369740B2 (US06330241-20011211-M00004.png) * | 1981-12-28 | 1991-11-05 | Sumitomo Electric Industries |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2950997C2 (de) * | 1979-12-18 | 1986-10-09 | Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa | Vorrichtung zum Beschichten |
-
1978
- 1978-06-28 JP JP7737178A patent/JPS556434A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0369740B2 (US06330241-20011211-M00004.png) * | 1981-12-28 | 1991-11-05 | Sumitomo Electric Industries | |
| JPH032441Y2 (US06330241-20011211-M00004.png) * | 1984-02-20 | 1991-01-23 | ||
| JPH032440Y2 (US06330241-20011211-M00004.png) * | 1984-02-20 | 1991-01-23 | ||
| JPH0347958Y2 (US06330241-20011211-M00004.png) * | 1984-02-20 | 1991-10-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS556434A (en) | 1980-01-17 |
