JPS5744806A - Method of two-dimensional measurement for pattern - Google Patents

Method of two-dimensional measurement for pattern

Info

Publication number
JPS5744806A
JPS5744806A JP12014280A JP12014280A JPS5744806A JP S5744806 A JPS5744806 A JP S5744806A JP 12014280 A JP12014280 A JP 12014280A JP 12014280 A JP12014280 A JP 12014280A JP S5744806 A JPS5744806 A JP S5744806A
Authority
JP
Japan
Prior art keywords
cameras
measurement
objective
output signal
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12014280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318683B2 (enExample
Inventor
Tomoaki Kawabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP12014280A priority Critical patent/JPS5744806A/ja
Publication of JPS5744806A publication Critical patent/JPS5744806A/ja
Publication of JPS6318683B2 publication Critical patent/JPS6318683B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP12014280A 1980-08-29 1980-08-29 Method of two-dimensional measurement for pattern Granted JPS5744806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12014280A JPS5744806A (en) 1980-08-29 1980-08-29 Method of two-dimensional measurement for pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12014280A JPS5744806A (en) 1980-08-29 1980-08-29 Method of two-dimensional measurement for pattern

Publications (2)

Publication Number Publication Date
JPS5744806A true JPS5744806A (en) 1982-03-13
JPS6318683B2 JPS6318683B2 (enExample) 1988-04-19

Family

ID=14778998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12014280A Granted JPS5744806A (en) 1980-08-29 1980-08-29 Method of two-dimensional measurement for pattern

Country Status (1)

Country Link
JP (1) JPS5744806A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038609A (ja) * 1983-08-10 1985-02-28 Sumitomo Metal Ind Ltd 板形状測定装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2560352Y2 (ja) * 1994-07-06 1998-01-21 光陽産業株式会社 ガスコック

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038609A (ja) * 1983-08-10 1985-02-28 Sumitomo Metal Ind Ltd 板形状測定装置

Also Published As

Publication number Publication date
JPS6318683B2 (enExample) 1988-04-19

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