JPS5744684Y2 - - Google Patents
Info
- Publication number
- JPS5744684Y2 JPS5744684Y2 JP1981007655U JP765581U JPS5744684Y2 JP S5744684 Y2 JPS5744684 Y2 JP S5744684Y2 JP 1981007655 U JP1981007655 U JP 1981007655U JP 765581 U JP765581 U JP 765581U JP S5744684 Y2 JPS5744684 Y2 JP S5744684Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981007655U JPS5744684Y2 (en:Method) | 1981-01-22 | 1981-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981007655U JPS5744684Y2 (en:Method) | 1981-01-22 | 1981-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56134744U JPS56134744U (en:Method) | 1981-10-13 |
| JPS5744684Y2 true JPS5744684Y2 (en:Method) | 1982-10-02 |
Family
ID=29604318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981007655U Expired JPS5744684Y2 (en:Method) | 1981-01-22 | 1981-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5744684Y2 (en:Method) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4839163A (en:Method) * | 1971-09-22 | 1973-06-08 | ||
| JPS4849376A (en:Method) * | 1971-10-22 | 1973-07-12 | ||
| GB1557924A (en) * | 1976-02-05 | 1979-12-19 | Western Electric Co | Irradiation apparatus and methods |
-
1981
- 1981-01-22 JP JP1981007655U patent/JPS5744684Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56134744U (en:Method) | 1981-10-13 |