JPS5744684Y2 - - Google Patents

Info

Publication number
JPS5744684Y2
JPS5744684Y2 JP1981007655U JP765581U JPS5744684Y2 JP S5744684 Y2 JPS5744684 Y2 JP S5744684Y2 JP 1981007655 U JP1981007655 U JP 1981007655U JP 765581 U JP765581 U JP 765581U JP S5744684 Y2 JPS5744684 Y2 JP S5744684Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981007655U
Other languages
Japanese (ja)
Other versions
JPS56134744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981007655U priority Critical patent/JPS5744684Y2/ja
Publication of JPS56134744U publication Critical patent/JPS56134744U/ja
Application granted granted Critical
Publication of JPS5744684Y2 publication Critical patent/JPS5744684Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP1981007655U 1981-01-22 1981-01-22 Expired JPS5744684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981007655U JPS5744684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-01-22 1981-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981007655U JPS5744684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-01-22 1981-01-22

Publications (2)

Publication Number Publication Date
JPS56134744U JPS56134744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-10-13
JPS5744684Y2 true JPS5744684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-10-02

Family

ID=29604318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981007655U Expired JPS5744684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-01-22 1981-01-22

Country Status (1)

Country Link
JP (1) JPS5744684Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839163A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-22 1973-06-08
JPS4849376A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-10-22 1973-07-12
GB1557924A (en) * 1976-02-05 1979-12-19 Western Electric Co Irradiation apparatus and methods

Also Published As

Publication number Publication date
JPS56134744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-10-13

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