JPS5743890Y2 - - Google Patents

Info

Publication number
JPS5743890Y2
JPS5743890Y2 JP3754278U JP3754278U JPS5743890Y2 JP S5743890 Y2 JPS5743890 Y2 JP S5743890Y2 JP 3754278 U JP3754278 U JP 3754278U JP 3754278 U JP3754278 U JP 3754278U JP S5743890 Y2 JPS5743890 Y2 JP S5743890Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3754278U
Other languages
Japanese (ja)
Other versions
JPS54140064U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3754278U priority Critical patent/JPS5743890Y2/ja
Publication of JPS54140064U publication Critical patent/JPS54140064U/ja
Application granted granted Critical
Publication of JPS5743890Y2 publication Critical patent/JPS5743890Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3754278U 1978-03-23 1978-03-23 Expired JPS5743890Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3754278U JPS5743890Y2 (enrdf_load_stackoverflow) 1978-03-23 1978-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3754278U JPS5743890Y2 (enrdf_load_stackoverflow) 1978-03-23 1978-03-23

Publications (2)

Publication Number Publication Date
JPS54140064U JPS54140064U (enrdf_load_stackoverflow) 1979-09-28
JPS5743890Y2 true JPS5743890Y2 (enrdf_load_stackoverflow) 1982-09-28

Family

ID=28900793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3754278U Expired JPS5743890Y2 (enrdf_load_stackoverflow) 1978-03-23 1978-03-23

Country Status (1)

Country Link
JP (1) JPS5743890Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5579870A (en) * 1978-12-14 1980-06-16 Shinko Seiki Kk Evaporation apparatus for substance in vacuum

Also Published As

Publication number Publication date
JPS54140064U (enrdf_load_stackoverflow) 1979-09-28

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