JPS5743189A - Heating furnace - Google Patents

Heating furnace

Info

Publication number
JPS5743189A
JPS5743189A JP11928180A JP11928180A JPS5743189A JP S5743189 A JPS5743189 A JP S5743189A JP 11928180 A JP11928180 A JP 11928180A JP 11928180 A JP11928180 A JP 11928180A JP S5743189 A JPS5743189 A JP S5743189A
Authority
JP
Japan
Prior art keywords
heating furnace
furnace
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11928180A
Other languages
Japanese (ja)
Inventor
Yukiya Takezaki
Kouichi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11928180A priority Critical patent/JPS5743189A/en
Publication of JPS5743189A publication Critical patent/JPS5743189A/en
Pending legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
JP11928180A 1980-08-29 1980-08-29 Heating furnace Pending JPS5743189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11928180A JPS5743189A (en) 1980-08-29 1980-08-29 Heating furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11928180A JPS5743189A (en) 1980-08-29 1980-08-29 Heating furnace

Publications (1)

Publication Number Publication Date
JPS5743189A true JPS5743189A (en) 1982-03-11

Family

ID=14757493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11928180A Pending JPS5743189A (en) 1980-08-29 1980-08-29 Heating furnace

Country Status (1)

Country Link
JP (1) JPS5743189A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010073772A (en) * 2008-09-17 2010-04-02 Hitachi Kokusai Electric Inc Method of manufacturing semiconductor device, and heat treatment apparatus
US10407799B2 (en) * 2016-09-28 2019-09-10 Tsinghua University Semimetal compound of Pt and method for making the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010073772A (en) * 2008-09-17 2010-04-02 Hitachi Kokusai Electric Inc Method of manufacturing semiconductor device, and heat treatment apparatus
US10407799B2 (en) * 2016-09-28 2019-09-10 Tsinghua University Semimetal compound of Pt and method for making the same

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