JPS5743148B2 - - Google Patents

Info

Publication number
JPS5743148B2
JPS5743148B2 JP51099368A JP9936876A JPS5743148B2 JP S5743148 B2 JPS5743148 B2 JP S5743148B2 JP 51099368 A JP51099368 A JP 51099368A JP 9936876 A JP9936876 A JP 9936876A JP S5743148 B2 JPS5743148 B2 JP S5743148B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51099368A
Other languages
Japanese (ja)
Other versions
JPS5325244A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9936876A priority Critical patent/JPS5325244A/ja
Publication of JPS5325244A publication Critical patent/JPS5325244A/ja
Publication of JPS5743148B2 publication Critical patent/JPS5743148B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP9936876A 1976-08-20 1976-08-20 Method of plasma etching molybdenum Granted JPS5325244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9936876A JPS5325244A (en) 1976-08-20 1976-08-20 Method of plasma etching molybdenum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9936876A JPS5325244A (en) 1976-08-20 1976-08-20 Method of plasma etching molybdenum

Publications (2)

Publication Number Publication Date
JPS5325244A JPS5325244A (en) 1978-03-08
JPS5743148B2 true JPS5743148B2 (enEXAMPLES) 1982-09-13

Family

ID=14245597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9936876A Granted JPS5325244A (en) 1976-08-20 1976-08-20 Method of plasma etching molybdenum

Country Status (1)

Country Link
JP (1) JPS5325244A (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726171A (en) * 1980-07-24 1982-02-12 Nec Corp Dry etching method for molybdenum

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441870B2 (enEXAMPLES) * 1972-11-22 1979-12-11

Also Published As

Publication number Publication date
JPS5325244A (en) 1978-03-08

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