JPS5741164A - Dual carrier for lapping - Google Patents
Dual carrier for lappingInfo
- Publication number
- JPS5741164A JPS5741164A JP55110753A JP11075380A JPS5741164A JP S5741164 A JPS5741164 A JP S5741164A JP 55110753 A JP55110753 A JP 55110753A JP 11075380 A JP11075380 A JP 11075380A JP S5741164 A JPS5741164 A JP S5741164A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- lapping
- bluesteel
- carriers
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
PURPOSE:To prevent works from being scratched, by rotating polygonal fragile material, such as for example thin quartz plate, freely, in an inner carrier of a dual carrier for lapping so as to make possible to perform the lapping of the works with an ultrahigh degree of precision. CONSTITUTION:Inner carriers 2 made of plastic material or soft metal material are incorporated in a carrier 1 made of bluesteel having a strength and a hardness which are sufficient for withstanding lapping. The shape of a recess in the inner carrier 2 is square corresponding to the external form of a work, and the external shape of the inner carrier 2 itself is round so as to make possible to freely rotate, readily in the bluesteel carrier 1 which holds the inner carriers 2 with 0.01-0.20mm. clearance therebetween, thereby the inner carriers 2 can be smoothly rotated when the bluesteel carrier 1 is made planetary motion during the lapping. Thus, A high degree of precision in the thickness of the work can be maintained under the lapping.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55110753A JPS5741164A (en) | 1980-08-12 | 1980-08-12 | Dual carrier for lapping |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55110753A JPS5741164A (en) | 1980-08-12 | 1980-08-12 | Dual carrier for lapping |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5741164A true JPS5741164A (en) | 1982-03-08 |
Family
ID=14543682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55110753A Pending JPS5741164A (en) | 1980-08-12 | 1980-08-12 | Dual carrier for lapping |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5741164A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59201756A (en) * | 1983-04-25 | 1984-11-15 | Matsushima Kogyo Co Ltd | Polishing carrier |
JPS60249568A (en) * | 1984-05-21 | 1985-12-10 | Sumitomo Electric Ind Ltd | Polishing of semiconductor wafer |
JPS6224964A (en) * | 1985-07-12 | 1987-02-02 | ワツカ−・ケミトロニク・ゲゼルシヤフト・フユア・エレクトロニク・グルントシユトツフエ・ミツト・ベシユレンクテル・ハフツング | Double polishing working method of discoid type workpiece and discoid carrier |
DE102007049811A1 (en) | 2007-10-17 | 2009-04-23 | Siltronic Ag | Rotor disc, method for coating a rotor disc and method for the simultaneous double-sided material removing machining of semiconductor wafers |
JP2009194631A (en) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | Wafer, wafer polishing device, method of polishing wafer, method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic equipment, and radio clock |
DE102009047927A1 (en) | 2009-10-01 | 2011-01-27 | Siltronic Ag | Rotor disk for supporting one or multiple disks for conditioning polishing cloth in polishing machine, has core made of material, which have high rigidity and core is fully and partially provided with coating |
DE102012206398A1 (en) | 2012-04-18 | 2012-06-21 | Siltronic Ag | Method for performing two-sided planarization of semiconductor material e.g. wafer, involves providing the insert inside recesses in rotary disc, while supplying the polishing agent in the recess |
DE102011080323A1 (en) | 2011-08-03 | 2013-02-07 | Siltronic Ag | Method for simultaneously abrasive processing e.g. front surface of single crystalline silicon wafer in semiconductor industry, involves locating wafer and ring in recess of rotor disk such that edge of recess of disk guides wafer and ring |
DE102012218745A1 (en) | 2012-10-15 | 2014-04-17 | Siltronic Ag | Method for simultaneous two-sided material-removing machining of surfaces of disc of e.g. semiconductor wafer, involves conducting disc of semiconductor material during co-material-machining of surfaces of recess in rotor disc |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113294A (en) * | 1975-03-31 | 1976-10-06 | Citizen Watch Co Ltd | Carrier for lapping wafer |
-
1980
- 1980-08-12 JP JP55110753A patent/JPS5741164A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113294A (en) * | 1975-03-31 | 1976-10-06 | Citizen Watch Co Ltd | Carrier for lapping wafer |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59201756A (en) * | 1983-04-25 | 1984-11-15 | Matsushima Kogyo Co Ltd | Polishing carrier |
JPS60249568A (en) * | 1984-05-21 | 1985-12-10 | Sumitomo Electric Ind Ltd | Polishing of semiconductor wafer |
JPS6224964A (en) * | 1985-07-12 | 1987-02-02 | ワツカ−・ケミトロニク・ゲゼルシヤフト・フユア・エレクトロニク・グルントシユトツフエ・ミツト・ベシユレンクテル・ハフツング | Double polishing working method of discoid type workpiece and discoid carrier |
DE102007049811A1 (en) | 2007-10-17 | 2009-04-23 | Siltronic Ag | Rotor disc, method for coating a rotor disc and method for the simultaneous double-sided material removing machining of semiconductor wafers |
DE102007049811B4 (en) * | 2007-10-17 | 2016-07-28 | Peter Wolters Gmbh | Rotor disc, method for coating a rotor disc and method for the simultaneous double-sided material removing machining of semiconductor wafers |
US9539695B2 (en) | 2007-10-17 | 2017-01-10 | Siltronic Ag | Carrier, method for coating a carrier, and method for the simultaneous double-side material-removing machining of semiconductor wafers |
JP2009194631A (en) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | Wafer, wafer polishing device, method of polishing wafer, method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic equipment, and radio clock |
DE102009047927A1 (en) | 2009-10-01 | 2011-01-27 | Siltronic Ag | Rotor disk for supporting one or multiple disks for conditioning polishing cloth in polishing machine, has core made of material, which have high rigidity and core is fully and partially provided with coating |
DE102011080323A1 (en) | 2011-08-03 | 2013-02-07 | Siltronic Ag | Method for simultaneously abrasive processing e.g. front surface of single crystalline silicon wafer in semiconductor industry, involves locating wafer and ring in recess of rotor disk such that edge of recess of disk guides wafer and ring |
DE102012206398A1 (en) | 2012-04-18 | 2012-06-21 | Siltronic Ag | Method for performing two-sided planarization of semiconductor material e.g. wafer, involves providing the insert inside recesses in rotary disc, while supplying the polishing agent in the recess |
DE102012218745A1 (en) | 2012-10-15 | 2014-04-17 | Siltronic Ag | Method for simultaneous two-sided material-removing machining of surfaces of disc of e.g. semiconductor wafer, involves conducting disc of semiconductor material during co-material-machining of surfaces of recess in rotor disc |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BR7602039A (en) | SUITABLE GLASS COMPOSITION FOR THE PRODUCTION OF PHOTOCHROMIC GLASS ARTICLES, CHEMICALLY REINFORCED, IN SHAPED SHEETS; PHOTOCHROMIC ARTICLES CHEMICALLY REINFORCED; AND PROCESS FOR THE PRODUCTION OF SUCH GLASS | |
CA1005211A (en) | Molded article formed of fiber reinforced material and method and apparatus for the fabrication thereof | |
BE783461A (en) | PROCESS FOR REINFORCING THE EDGES OF A GLASS ARTICLE AND ARTICLES THUS TREATED | |
JPS5741164A (en) | Dual carrier for lapping | |
FR1251267A (en) | Process for the manufacture of lightweight elements which can be used in particular in construction | |
DE2965601D1 (en) | Process for the production of ferrous alloys with improved mechanical properties by the use of lanthanum, and ferrous alloys obtained by this process | |
DE3368593D1 (en) | Metal oxide articles, processes for their production and light sources | |
DE3063537D1 (en) | Rigid shaped body, biaxially drawn, of synthetic material, and process for the manufacturing thereof | |
CA974582A (en) | Process for the fabrication of nitrogen containing pulverized carbon | |
DE3162941D1 (en) | Method for the precision-manufacture of glass articles, method of manufacturing a mould or die and mould or die | |
DE59000952D1 (en) | SUPPORT WITH STRICTLY REDUCED FOAMING. | |
FR1271493A (en) | Continuous manufacturing process for very thin ceramic objects | |
BE790054A (en) | SEALING MASS, PROCESS FOR ITS MANUFACTURING AND APPLICATION, AS WELL AS A PART COATED WITH THIS SEALING MASS | |
JPS5249195A (en) | Protecting member attaching mechanism for planer article packing machi ne | |
JPS521513A (en) | Vessel with lining | |
AU462817B2 (en) | Process for the optical brightening of shaped articles | |
JPS52132497A (en) | Device for grinding both opposite surfaces of wafer | |
CA598310A (en) | Abrasion resistant plastic materials and articles and method for production thereof | |
ES438426A1 (en) | Process for manufacturing 2-stilbenyl-1,2,3-triazoles and new 2-stilbenyl-1,2,3-triazoles | |
JPS531106A (en) | Construction of cooling stave of furnace | |
CA906339A (en) | Process for the chemical thin film nickel-plating of iron or steel articles | |
DE58907989D1 (en) | Contact material and process for its manufacture. | |
BE592777A (en) | Plain bearing in synthetic material, in particular for fine mechanical gears, and method for its manufacture. | |
GB950127A (en) | Watch case | |
CA900681A (en) | Method for the fabrication of plastic shaped articles |