JPS5741064B2 - - Google Patents
Info
- Publication number
- JPS5741064B2 JPS5741064B2 JP50018577A JP1857775A JPS5741064B2 JP S5741064 B2 JPS5741064 B2 JP S5741064B2 JP 50018577 A JP50018577 A JP 50018577A JP 1857775 A JP1857775 A JP 1857775A JP S5741064 B2 JPS5741064 B2 JP S5741064B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50018577A JPS5741064B2 (enExample) | 1975-02-13 | 1975-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50018577A JPS5741064B2 (enExample) | 1975-02-13 | 1975-02-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5193158A JPS5193158A (enExample) | 1976-08-16 |
| JPS5741064B2 true JPS5741064B2 (enExample) | 1982-09-01 |
Family
ID=11975467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50018577A Expired JPS5741064B2 (enExample) | 1975-02-13 | 1975-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5741064B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457867A (en) * | 1977-10-17 | 1979-05-10 | Nichiden Varian Kk | Vacuum processor with automatic wafer feeder |
-
1975
- 1975-02-13 JP JP50018577A patent/JPS5741064B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5193158A (enExample) | 1976-08-16 |