JPS574092B2 - - Google Patents
Info
- Publication number
- JPS574092B2 JPS574092B2 JP13657576A JP13657576A JPS574092B2 JP S574092 B2 JPS574092 B2 JP S574092B2 JP 13657576 A JP13657576 A JP 13657576A JP 13657576 A JP13657576 A JP 13657576A JP S574092 B2 JPS574092 B2 JP S574092B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13657576A JPS5361280A (en) | 1976-11-12 | 1976-11-12 | Pattern projector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13657576A JPS5361280A (en) | 1976-11-12 | 1976-11-12 | Pattern projector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5361280A JPS5361280A (en) | 1978-06-01 |
| JPS574092B2 true JPS574092B2 (member.php) | 1982-01-25 |
Family
ID=15178466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13657576A Granted JPS5361280A (en) | 1976-11-12 | 1976-11-12 | Pattern projector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5361280A (member.php) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5989084A (ja) * | 1982-11-12 | 1984-05-23 | Sony Corp | ビデオテ−プ |
| JPS59110082A (ja) * | 1982-12-13 | 1984-06-25 | Sharp Corp | ビデオデイスク装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5463681A (en) * | 1977-10-29 | 1979-05-22 | Nippon Aviotronics Kk | Electron beam exposure device |
| US4757208A (en) * | 1986-03-07 | 1988-07-12 | Hughes Aircraft Company | Masked ion beam lithography system and method |
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1976
- 1976-11-12 JP JP13657576A patent/JPS5361280A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5989084A (ja) * | 1982-11-12 | 1984-05-23 | Sony Corp | ビデオテ−プ |
| JPS59110082A (ja) * | 1982-12-13 | 1984-06-25 | Sharp Corp | ビデオデイスク装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5361280A (en) | 1978-06-01 |