JPS5740925A - Detecting method of shifting speed - Google Patents

Detecting method of shifting speed

Info

Publication number
JPS5740925A
JPS5740925A JP11666680A JP11666680A JPS5740925A JP S5740925 A JPS5740925 A JP S5740925A JP 11666680 A JP11666680 A JP 11666680A JP 11666680 A JP11666680 A JP 11666680A JP S5740925 A JPS5740925 A JP S5740925A
Authority
JP
Japan
Prior art keywords
patterns
shifting speed
standstill
shifted
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11666680A
Other languages
Japanese (ja)
Inventor
Takenori Okubo
Yoshimitsu Majima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11666680A priority Critical patent/JPS5740925A/en
Publication of JPS5740925A publication Critical patent/JPS5740925A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/44—Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting

Abstract

PURPOSE:To detect the shrunk part of a mask pattern by a method wherein a stage, having a plurality of vernier patterns graduated at different pitches, is shifted at a fixed speed and the shifting speed is detected by the pattern which looks as if it is at a standstill among the plurality of patterns. CONSTITUTION:The stage 2 of a guide section is shifted by a driving section 1. The mask 3, whereon the vernier patterns are graduated, is fixed on the stage 2. The vision of a lens systme 7 is projected on an image monitor 4, one of the vernier patterns on the image monitor is seen as if it is at a standstill while the driving section 1 and the vernier patterns are shifted at a fixed step and measurements. The patterns 11, 10 and 12 are looked as if they are at a standstill when the feed of the driving secion 1 is 50mum/pulse, 49mum/pulse and 51mum/pulse. Through these procedures, the shifting speed can be visually detected. The expansion and contraction of a substance can be detected when the shifting speed of the substance is unchanged .
JP11666680A 1980-08-25 1980-08-25 Detecting method of shifting speed Pending JPS5740925A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11666680A JPS5740925A (en) 1980-08-25 1980-08-25 Detecting method of shifting speed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11666680A JPS5740925A (en) 1980-08-25 1980-08-25 Detecting method of shifting speed

Publications (1)

Publication Number Publication Date
JPS5740925A true JPS5740925A (en) 1982-03-06

Family

ID=14692881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11666680A Pending JPS5740925A (en) 1980-08-25 1980-08-25 Detecting method of shifting speed

Country Status (1)

Country Link
JP (1) JPS5740925A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129178A (en) * 1991-10-31 1993-05-25 Toshiba Corp Method for measuring misalignment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129178A (en) * 1991-10-31 1993-05-25 Toshiba Corp Method for measuring misalignment

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