JPS5740302Y2 - - Google Patents
Info
- Publication number
- JPS5740302Y2 JPS5740302Y2 JP1977144383U JP14438377U JPS5740302Y2 JP S5740302 Y2 JPS5740302 Y2 JP S5740302Y2 JP 1977144383 U JP1977144383 U JP 1977144383U JP 14438377 U JP14438377 U JP 14438377U JP S5740302 Y2 JPS5740302 Y2 JP S5740302Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977144383U JPS5740302Y2 (https=) | 1977-10-27 | 1977-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977144383U JPS5740302Y2 (https=) | 1977-10-27 | 1977-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5469145U JPS5469145U (https=) | 1979-05-16 |
| JPS5740302Y2 true JPS5740302Y2 (https=) | 1982-09-04 |
Family
ID=29122945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977144383U Expired JPS5740302Y2 (https=) | 1977-10-27 | 1977-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5740302Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014122371A (ja) * | 2012-12-20 | 2014-07-03 | Mitsubishi Electric Corp | 蒸着装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5536903Y2 (https=) * | 1974-12-26 | 1980-08-30 | ||
| JPS5185053U (https=) * | 1974-12-27 | 1976-07-08 | ||
| JPS52139345U (https=) * | 1976-04-15 | 1977-10-22 |
-
1977
- 1977-10-27 JP JP1977144383U patent/JPS5740302Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5469145U (https=) | 1979-05-16 |