JPS5739533B2 - - Google Patents
Info
- Publication number
- JPS5739533B2 JPS5739533B2 JP6981575A JP6981575A JPS5739533B2 JP S5739533 B2 JPS5739533 B2 JP S5739533B2 JP 6981575 A JP6981575 A JP 6981575A JP 6981575 A JP6981575 A JP 6981575A JP S5739533 B2 JPS5739533 B2 JP S5739533B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6981575A JPS51145267A (en) | 1975-06-09 | 1975-06-09 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6981575A JPS51145267A (en) | 1975-06-09 | 1975-06-09 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51145267A JPS51145267A (en) | 1976-12-14 |
| JPS5739533B2 true JPS5739533B2 (de) | 1982-08-21 |
Family
ID=13413622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6981575A Granted JPS51145267A (en) | 1975-06-09 | 1975-06-09 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51145267A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752141A (en) * | 1980-09-12 | 1982-03-27 | Sharp Corp | Manufacture of semiconductor element |
| DE10029658C2 (de) * | 2000-06-16 | 2003-01-09 | Infineon Technologies Ag | Verfahren zur Herstellung einer Barrierenschicht auf einem Siliziumsubstrat |
| JP4975974B2 (ja) * | 2005-03-18 | 2012-07-11 | ラピスセミコンダクタ株式会社 | Ｓｏｓウェハおよびその製造方法 |
-
1975
- 1975-06-09 JP JP6981575A patent/JPS51145267A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51145267A (en) | 1976-12-14 |