JPS5739050B2 - - Google Patents
Info
- Publication number
- JPS5739050B2 JPS5739050B2 JP901175A JP901175A JPS5739050B2 JP S5739050 B2 JPS5739050 B2 JP S5739050B2 JP 901175 A JP901175 A JP 901175A JP 901175 A JP901175 A JP 901175A JP S5739050 B2 JPS5739050 B2 JP S5739050B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP901175A JPS5183777A (ja) | 1975-01-21 | 1975-01-21 | Kisoseichosochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP901175A JPS5183777A (ja) | 1975-01-21 | 1975-01-21 | Kisoseichosochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5183777A JPS5183777A (ja) | 1976-07-22 |
| JPS5739050B2 true JPS5739050B2 (fi) | 1982-08-19 |
Family
ID=11708697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP901175A Granted JPS5183777A (ja) | 1975-01-21 | 1975-01-21 | Kisoseichosochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5183777A (fi) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4048955A (en) * | 1975-09-02 | 1977-09-20 | Texas Instruments Incorporated | Continuous chemical vapor deposition reactor |
| JPS62173712A (ja) * | 1986-01-27 | 1987-07-30 | Hitachi Ltd | 気相成長装置 |
| US5059770A (en) * | 1989-09-19 | 1991-10-22 | Watkins-Johnson Company | Multi-zone planar heater assembly and method of operation |
-
1975
- 1975-01-21 JP JP901175A patent/JPS5183777A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5183777A (ja) | 1976-07-22 |