JPS5738365Y2 - - Google Patents

Info

Publication number
JPS5738365Y2
JPS5738365Y2 JP1977110638U JP11063877U JPS5738365Y2 JP S5738365 Y2 JPS5738365 Y2 JP S5738365Y2 JP 1977110638 U JP1977110638 U JP 1977110638U JP 11063877 U JP11063877 U JP 11063877U JP S5738365 Y2 JPS5738365 Y2 JP S5738365Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977110638U
Other languages
Japanese (ja)
Other versions
JPS5438125U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977110638U priority Critical patent/JPS5738365Y2/ja
Publication of JPS5438125U publication Critical patent/JPS5438125U/ja
Application granted granted Critical
Publication of JPS5738365Y2 publication Critical patent/JPS5738365Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977110638U 1977-08-19 1977-08-19 Expired JPS5738365Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977110638U JPS5738365Y2 (cg-RX-API-DMAC7.html) 1977-08-19 1977-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977110638U JPS5738365Y2 (cg-RX-API-DMAC7.html) 1977-08-19 1977-08-19

Publications (2)

Publication Number Publication Date
JPS5438125U JPS5438125U (cg-RX-API-DMAC7.html) 1979-03-13
JPS5738365Y2 true JPS5738365Y2 (cg-RX-API-DMAC7.html) 1982-08-24

Family

ID=29057706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977110638U Expired JPS5738365Y2 (cg-RX-API-DMAC7.html) 1977-08-19 1977-08-19

Country Status (1)

Country Link
JP (1) JPS5738365Y2 (cg-RX-API-DMAC7.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4897741A (cg-RX-API-DMAC7.html) * 1972-03-27 1973-12-12
JPS51119386A (en) * 1975-04-11 1976-10-19 Denki Kagaku Kogyo Kk Vacuum evapotation vessel

Also Published As

Publication number Publication date
JPS5438125U (cg-RX-API-DMAC7.html) 1979-03-13

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