JPS5737473Y2 - - Google Patents
Info
- Publication number
- JPS5737473Y2 JPS5737473Y2 JP1978124463U JP12446378U JPS5737473Y2 JP S5737473 Y2 JPS5737473 Y2 JP S5737473Y2 JP 1978124463 U JP1978124463 U JP 1978124463U JP 12446378 U JP12446378 U JP 12446378U JP S5737473 Y2 JPS5737473 Y2 JP S5737473Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978124463U JPS5737473Y2 (cs) | 1978-09-11 | 1978-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978124463U JPS5737473Y2 (cs) | 1978-09-11 | 1978-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5540597U JPS5540597U (cs) | 1980-03-15 |
| JPS5737473Y2 true JPS5737473Y2 (cs) | 1982-08-18 |
Family
ID=29084486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978124463U Expired JPS5737473Y2 (cs) | 1978-09-11 | 1978-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5737473Y2 (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58124467U (ja) * | 1982-02-17 | 1983-08-24 | 日本真空技術株式会社 | 真空蒸着装置 |
| JPS61288067A (ja) * | 1985-06-13 | 1986-12-18 | Hitachi Ltd | スパツタ装置 |
-
1978
- 1978-09-11 JP JP1978124463U patent/JPS5737473Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5540597U (cs) | 1980-03-15 |