JPS5540597U - - Google Patents

Info

Publication number
JPS5540597U
JPS5540597U JP12446378U JP12446378U JPS5540597U JP S5540597 U JPS5540597 U JP S5540597U JP 12446378 U JP12446378 U JP 12446378U JP 12446378 U JP12446378 U JP 12446378U JP S5540597 U JPS5540597 U JP S5540597U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12446378U
Other languages
Japanese (ja)
Other versions
JPS5737473Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978124463U priority Critical patent/JPS5737473Y2/ja
Publication of JPS5540597U publication Critical patent/JPS5540597U/ja
Application granted granted Critical
Publication of JPS5737473Y2 publication Critical patent/JPS5737473Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP1978124463U 1978-09-11 1978-09-11 Expired JPS5737473Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978124463U JPS5737473Y2 (cs) 1978-09-11 1978-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978124463U JPS5737473Y2 (cs) 1978-09-11 1978-09-11

Publications (2)

Publication Number Publication Date
JPS5540597U true JPS5540597U (cs) 1980-03-15
JPS5737473Y2 JPS5737473Y2 (cs) 1982-08-18

Family

ID=29084486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978124463U Expired JPS5737473Y2 (cs) 1978-09-11 1978-09-11

Country Status (1)

Country Link
JP (1) JPS5737473Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置
JPS61288067A (ja) * 1985-06-13 1986-12-18 Hitachi Ltd スパツタ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置
JPS61288067A (ja) * 1985-06-13 1986-12-18 Hitachi Ltd スパツタ装置

Also Published As

Publication number Publication date
JPS5737473Y2 (cs) 1982-08-18

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