JPS5737436B2 - - Google Patents
Info
- Publication number
- JPS5737436B2 JPS5737436B2 JP13125274A JP13125274A JPS5737436B2 JP S5737436 B2 JPS5737436 B2 JP S5737436B2 JP 13125274 A JP13125274 A JP 13125274A JP 13125274 A JP13125274 A JP 13125274A JP S5737436 B2 JPS5737436 B2 JP S5737436B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5308273A GB1485367A (en) | 1973-11-15 | 1973-11-15 | Electron beam generators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50112241A JPS50112241A (ja) | 1975-09-03 |
| JPS5737436B2 true JPS5737436B2 (ja) | 1982-08-10 |
Family
ID=10466552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13125274A Expired JPS5737436B2 (ja) | 1973-11-15 | 1974-11-15 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5737436B2 (ja) |
| DE (1) | DE2454139A1 (ja) |
| FR (1) | FR2251909B3 (ja) |
| GB (1) | GB1485367A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4430534A1 (de) * | 1994-08-27 | 1996-04-11 | Hell Ag Linotype | Elektronenstrahl-Erzeuger |
| JPH08287858A (ja) * | 1995-04-13 | 1996-11-01 | Nec Corp | 電子ビーム溶接機用電子ビーム軌道偏向システム |
| DE19752802C2 (de) * | 1997-11-28 | 2001-04-12 | Ardenne Anlagentech Gmbh | Strahlerzeugungssystem für Elektronenkanonen |
| JP2011014244A (ja) * | 2009-06-30 | 2011-01-20 | Hitachi High-Technologies Corp | 荷電粒子銃及び荷電粒子線装置 |
| US11107656B2 (en) * | 2017-06-02 | 2021-08-31 | Hitachi High-Tech Corporation | Charged particle beam device |
-
1973
- 1973-11-15 GB GB5308273A patent/GB1485367A/en not_active Expired
-
1974
- 1974-11-14 DE DE19742454139 patent/DE2454139A1/de not_active Ceased
- 1974-11-15 FR FR7437714A patent/FR2251909B3/fr not_active Expired
- 1974-11-15 JP JP13125274A patent/JPS5737436B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2251909B3 (ja) | 1977-08-12 |
| DE2454139A1 (de) | 1975-05-22 |
| FR2251909A1 (ja) | 1975-06-13 |
| JPS50112241A (ja) | 1975-09-03 |
| GB1485367A (en) | 1977-09-08 |