JPS5737309A - Focal point detection system of microscope - Google Patents

Focal point detection system of microscope

Info

Publication number
JPS5737309A
JPS5737309A JP11230580A JP11230580A JPS5737309A JP S5737309 A JPS5737309 A JP S5737309A JP 11230580 A JP11230580 A JP 11230580A JP 11230580 A JP11230580 A JP 11230580A JP S5737309 A JPS5737309 A JP S5737309A
Authority
JP
Japan
Prior art keywords
detected
high frequency
image
objective lens
peak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11230580A
Other languages
Japanese (ja)
Inventor
Norio Fujii
Atsushi Kawahara
Masahiro Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP11230580A priority Critical patent/JPS5737309A/en
Priority to US06/180,150 priority patent/US4342905A/en
Publication of JPS5737309A publication Critical patent/JPS5737309A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques

Abstract

PURPOSE:To prevent the erroneous detection of peaks at the out-of-focus by performing the focus detection operation of optoelectrically detecting the image of an object, and extracting the high frequency components of the space frequencies of said image in the different plural focus detection areas of the object. CONSTITUTION:A microtest plate 1 is placed on the stage 2 of a phase contrast microscope, and an objective lens 6 is moved by a driver 5. The image of the specimen is made into an electric signal by a camera 7 and this signal is supplied to a high frequency component extraction circuit 8. In a peak detection circuit 9, the value P1 of a maximum peak and the objective lens position l1 giving this are detected; at the same time, the value P2 of the 2nd peak and the objective lens position l2 giving this are detected. The focusing position is determined by a processing circuit 10. Hence, by determining the evaluation value indicating the probability of whether the maximum peak occurs in the focusing or not from the extracted high frequency component information, the correct focusing position is detected without being perplexed by false peaks.
JP11230580A 1979-08-31 1980-08-16 Focal point detection system of microscope Pending JPS5737309A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11230580A JPS5737309A (en) 1980-08-16 1980-08-16 Focal point detection system of microscope
US06/180,150 US4342905A (en) 1979-08-31 1980-08-21 Automatic focusing device of a microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11230580A JPS5737309A (en) 1980-08-16 1980-08-16 Focal point detection system of microscope

Publications (1)

Publication Number Publication Date
JPS5737309A true JPS5737309A (en) 1982-03-01

Family

ID=14583344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11230580A Pending JPS5737309A (en) 1979-08-31 1980-08-16 Focal point detection system of microscope

Country Status (1)

Country Link
JP (1) JPS5737309A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61245123A (en) * 1985-04-23 1986-10-31 Nippon Kogaku Kk <Nikon> Focus detector
JPS63161988U (en) * 1987-04-07 1988-10-21
JPH01121925U (en) * 1988-02-10 1989-08-18
JPH04112214U (en) * 1991-03-20 1992-09-30 株式会社三協精機製作所 microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61245123A (en) * 1985-04-23 1986-10-31 Nippon Kogaku Kk <Nikon> Focus detector
JPS63161988U (en) * 1987-04-07 1988-10-21
JPH0355665Y2 (en) * 1987-04-07 1991-12-11
JPH01121925U (en) * 1988-02-10 1989-08-18
JPH04112214U (en) * 1991-03-20 1992-09-30 株式会社三協精機製作所 microscope

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