JPS5635111A - Focus detector of phase contrast microscope - Google Patents

Focus detector of phase contrast microscope

Info

Publication number
JPS5635111A
JPS5635111A JP11036379A JP11036379A JPS5635111A JP S5635111 A JPS5635111 A JP S5635111A JP 11036379 A JP11036379 A JP 11036379A JP 11036379 A JP11036379 A JP 11036379A JP S5635111 A JPS5635111 A JP S5635111A
Authority
JP
Japan
Prior art keywords
peak
maximum peak
driving device
objective lens
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11036379A
Other languages
Japanese (ja)
Other versions
JPS6232761B2 (en
Inventor
Norio Fujii
Atsushi Kawahara
Masahiro Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP11036379A priority Critical patent/JPS5635111A/en
Priority to US06/180,150 priority patent/US4342905A/en
Publication of JPS5635111A publication Critical patent/JPS5635111A/en
Publication of JPS6232761B2 publication Critical patent/JPS6232761B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To make possible the detection of a correct focus by deciding whether the maximum peak of photoelectric detecting means output is to be used for focusing or not from the relation with the 2nd peak smaller than the maximum peak.
CONSTITUTION: A microtest plate 1 is placed in front of a phase difference objective lens 2. A high frequency extracting circuit 5 extracts the high frequency component of the space frequency component of the image from the electric signal of a camera 4. A peak detecting circuit 6 detects the value P1 of the maximum peak from the output of the high frequency extracting circuit 5 and the objective lens position l1 that gives the maximum peak from the distance output of a driving device 3, respectively and simultaneously detects the 2nd peak values P2, l2, respectively. When P1, l1 and P2, l satisfy the 4 conditions shown by the formulas 1W4, a processing circuit 7 outputs the distance signal l1+lc to a driving device 3. The constants ld, ld', ΔP, Pth, lc of the respective conditions are empirically determined. As a result, the driving device 3 moves the objective lens 2 to the focus position BF.
COPYRIGHT: (C)1981,JPO&Japio
JP11036379A 1979-08-31 1979-08-31 Focus detector of phase contrast microscope Granted JPS5635111A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11036379A JPS5635111A (en) 1979-08-31 1979-08-31 Focus detector of phase contrast microscope
US06/180,150 US4342905A (en) 1979-08-31 1980-08-21 Automatic focusing device of a microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11036379A JPS5635111A (en) 1979-08-31 1979-08-31 Focus detector of phase contrast microscope

Publications (2)

Publication Number Publication Date
JPS5635111A true JPS5635111A (en) 1981-04-07
JPS6232761B2 JPS6232761B2 (en) 1987-07-16

Family

ID=14533881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11036379A Granted JPS5635111A (en) 1979-08-31 1979-08-31 Focus detector of phase contrast microscope

Country Status (1)

Country Link
JP (1) JPS5635111A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824104A (en) * 1981-07-17 1983-02-14 Jeol Ltd Focusing device of thermography device
JPS61198204A (en) * 1985-02-28 1986-09-02 Disco Abrasive Sys Ltd Automatic focusing method for microscope
US5177343A (en) * 1989-12-22 1993-01-05 Sumitomo Electric Industries, Ltd. Symbol reader using differentiating circuit for light beam focusing
JPH10502466A (en) * 1994-07-01 1998-03-03 ジェフレイ エイチ． プライス， Autofocus system for scanning microscopy
JP2005326681A (en) * 2004-05-14 2005-11-24 Pentax Corp Focus detector and focus detecting method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824104A (en) * 1981-07-17 1983-02-14 Jeol Ltd Focusing device of thermography device
JPH0410608B2 (en) * 1981-07-17 1992-02-25
JPS61198204A (en) * 1985-02-28 1986-09-02 Disco Abrasive Sys Ltd Automatic focusing method for microscope
US5177343A (en) * 1989-12-22 1993-01-05 Sumitomo Electric Industries, Ltd. Symbol reader using differentiating circuit for light beam focusing
JPH10502466A (en) * 1994-07-01 1998-03-03 ジェフレイ エイチ． プライス， Autofocus system for scanning microscopy
JP2005326681A (en) * 2004-05-14 2005-11-24 Pentax Corp Focus detector and focus detecting method

Also Published As

Publication number Publication date
JPS6232761B2 (en) 1987-07-16

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