JPS5736283B2 - - Google Patents
Info
- Publication number
- JPS5736283B2 JPS5736283B2 JP988973A JP988973A JPS5736283B2 JP S5736283 B2 JPS5736283 B2 JP S5736283B2 JP 988973 A JP988973 A JP 988973A JP 988973 A JP988973 A JP 988973A JP S5736283 B2 JPS5736283 B2 JP S5736283B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988973A JPS5736283B2 (zh) | 1973-01-25 | 1973-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988973A JPS5736283B2 (zh) | 1973-01-25 | 1973-01-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4999584A JPS4999584A (zh) | 1974-09-20 |
| JPS5736283B2 true JPS5736283B2 (zh) | 1982-08-03 |
Family
ID=11732694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP988973A Expired JPS5736283B2 (zh) | 1973-01-25 | 1973-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5736283B2 (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CS170387B1 (zh) * | 1973-08-15 | 1976-08-27 | ||
| KR100327576B1 (ko) * | 1999-06-26 | 2002-03-14 | 박종섭 | 193ｎｍ ＡｒＦ광을 이용한 초미세 패턴 형성 공정에서 반사방지막으로 사용할 수 있는 유기 반사방지 중합체 및 그의 제조방법 |
| KR100400243B1 (ko) * | 1999-06-26 | 2003-10-01 | 주식회사 하이닉스반도체 | 유기 반사방지 중합체 및 그의 제조방법 |
| GB2398787B (en) * | 2000-06-13 | 2004-10-27 | Hyundai Electronics Ind | Organic anti-reflective polymer and preparation thereof |
-
1973
- 1973-01-25 JP JP988973A patent/JPS5736283B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4999584A (zh) | 1974-09-20 |