JPS5736283B2 - - Google Patents

Info

Publication number
JPS5736283B2
JPS5736283B2 JP988973A JP988973A JPS5736283B2 JP S5736283 B2 JPS5736283 B2 JP S5736283B2 JP 988973 A JP988973 A JP 988973A JP 988973 A JP988973 A JP 988973A JP S5736283 B2 JPS5736283 B2 JP S5736283B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP988973A
Other languages
Japanese (ja)
Other versions
JPS4999584A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP988973A priority Critical patent/JPS5736283B2/ja
Publication of JPS4999584A publication Critical patent/JPS4999584A/ja
Publication of JPS5736283B2 publication Critical patent/JPS5736283B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP988973A 1973-01-25 1973-01-25 Expired JPS5736283B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP988973A JPS5736283B2 (enrdf_load_stackoverflow) 1973-01-25 1973-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP988973A JPS5736283B2 (enrdf_load_stackoverflow) 1973-01-25 1973-01-25

Publications (2)

Publication Number Publication Date
JPS4999584A JPS4999584A (enrdf_load_stackoverflow) 1974-09-20
JPS5736283B2 true JPS5736283B2 (enrdf_load_stackoverflow) 1982-08-03

Family

ID=11732694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP988973A Expired JPS5736283B2 (enrdf_load_stackoverflow) 1973-01-25 1973-01-25

Country Status (1)

Country Link
JP (1) JPS5736283B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CS170387B1 (enrdf_load_stackoverflow) * 1973-08-15 1976-08-27
KR100400243B1 (ko) * 1999-06-26 2003-10-01 주식회사 하이닉스반도체 유기 반사방지 중합체 및 그의 제조방법
KR100327576B1 (ko) * 1999-06-26 2002-03-14 박종섭 193nm ArF광을 이용한 초미세 패턴 형성 공정에서 반사방지막으로 사용할 수 있는 유기 반사방지 중합체 및 그의 제조방법
GB2398787B (en) * 2000-06-13 2004-10-27 Hyundai Electronics Ind Organic anti-reflective polymer and preparation thereof

Also Published As

Publication number Publication date
JPS4999584A (enrdf_load_stackoverflow) 1974-09-20

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