JPS5736147Y2 - - Google Patents
Info
- Publication number
- JPS5736147Y2 JPS5736147Y2 JP1977031997U JP3199777U JPS5736147Y2 JP S5736147 Y2 JPS5736147 Y2 JP S5736147Y2 JP 1977031997 U JP1977031997 U JP 1977031997U JP 3199777 U JP3199777 U JP 3199777U JP S5736147 Y2 JPS5736147 Y2 JP S5736147Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
- Treatment Of Fiber Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977031997U JPS5736147Y2 (en) | 1977-03-18 | 1977-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977031997U JPS5736147Y2 (en) | 1977-03-18 | 1977-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53127771U JPS53127771U (en) | 1978-10-11 |
| JPS5736147Y2 true JPS5736147Y2 (en) | 1982-08-10 |
Family
ID=28884657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977031997U Expired JPS5736147Y2 (en) | 1977-03-18 | 1977-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5736147Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5232000A (en) * | 1975-09-06 | 1977-03-10 | Ozawa Juichiro | Process of silicon nitride thin film |
-
1977
- 1977-03-18 JP JP1977031997U patent/JPS5736147Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5232000A (en) * | 1975-09-06 | 1977-03-10 | Ozawa Juichiro | Process of silicon nitride thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53127771U (en) | 1978-10-11 |