JPS5734348B2 - - Google Patents
Info
- Publication number
- JPS5734348B2 JPS5734348B2 JP7294176A JP7294176A JPS5734348B2 JP S5734348 B2 JPS5734348 B2 JP S5734348B2 JP 7294176 A JP7294176 A JP 7294176A JP 7294176 A JP7294176 A JP 7294176A JP S5734348 B2 JPS5734348 B2 JP S5734348B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7294176A JPS52156185A (en) | 1976-06-21 | 1976-06-21 | Horizontalltype discharge apparatus with cross magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7294176A JPS52156185A (en) | 1976-06-21 | 1976-06-21 | Horizontalltype discharge apparatus with cross magnetic field |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52156185A JPS52156185A (en) | 1977-12-26 |
| JPS5734348B2 true JPS5734348B2 (fi) | 1982-07-22 |
Family
ID=13503893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7294176A Granted JPS52156185A (en) | 1976-06-21 | 1976-06-21 | Horizontalltype discharge apparatus with cross magnetic field |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52156185A (fi) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6319748A (ja) * | 1986-07-11 | 1988-01-27 | Sony Corp | マグネトロン放電装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS473154U (fi) * | 1971-01-29 | 1972-09-02 | ||
| JPS4825401U (fi) * | 1971-08-02 | 1973-03-26 | ||
| JPS5011480A (fi) * | 1973-06-01 | 1975-02-05 | ||
| JPS50160181A (fi) * | 1974-06-20 | 1975-12-25 | ||
| JPS5288277A (en) * | 1976-01-19 | 1977-07-23 | Comtec Kk | Spatter coating apparatus |
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
-
1976
- 1976-06-21 JP JP7294176A patent/JPS52156185A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS473154U (fi) * | 1971-01-29 | 1972-09-02 | ||
| JPS4825401U (fi) * | 1971-08-02 | 1973-03-26 | ||
| JPS5011480A (fi) * | 1973-06-01 | 1975-02-05 | ||
| JPS50160181A (fi) * | 1974-06-20 | 1975-12-25 | ||
| JPS5288277A (en) * | 1976-01-19 | 1977-07-23 | Comtec Kk | Spatter coating apparatus |
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52156185A (en) | 1977-12-26 |