JPS5733700B2 - - Google Patents

Info

Publication number
JPS5733700B2
JPS5733700B2 JP5108574A JP5108574A JPS5733700B2 JP S5733700 B2 JPS5733700 B2 JP S5733700B2 JP 5108574 A JP5108574 A JP 5108574A JP 5108574 A JP5108574 A JP 5108574A JP S5733700 B2 JPS5733700 B2 JP S5733700B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5108574A
Other languages
Japanese (ja)
Other versions
JPS50147877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5108574A priority Critical patent/JPS5733700B2/ja
Publication of JPS50147877A publication Critical patent/JPS50147877A/ja
Publication of JPS5733700B2 publication Critical patent/JPS5733700B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP5108574A 1974-05-08 1974-05-08 Expired JPS5733700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5108574A JPS5733700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-08 1974-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5108574A JPS5733700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-08 1974-05-08

Publications (2)

Publication Number Publication Date
JPS50147877A JPS50147877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-11-27
JPS5733700B2 true JPS5733700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-07-19

Family

ID=12876966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5108574A Expired JPS5733700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-08 1974-05-08

Country Status (1)

Country Link
JP (1) JPS5733700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633819A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Preparation of semiconductor device
JPS58106873A (ja) * 1981-12-18 1983-06-25 Seiko Epson Corp 半導体装置の製造方法
JP4454883B2 (ja) * 2001-04-26 2010-04-21 東京エレクトロン株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS50147877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-11-27

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