JPS5732231B2 - - Google Patents

Info

Publication number
JPS5732231B2
JPS5732231B2 JP10137476A JP10137476A JPS5732231B2 JP S5732231 B2 JPS5732231 B2 JP S5732231B2 JP 10137476 A JP10137476 A JP 10137476A JP 10137476 A JP10137476 A JP 10137476A JP S5732231 B2 JPS5732231 B2 JP S5732231B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10137476A
Other languages
Japanese (ja)
Other versions
JPS5327103A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10137476A priority Critical patent/JPS5327103A/ja
Publication of JPS5327103A publication Critical patent/JPS5327103A/ja
Publication of JPS5732231B2 publication Critical patent/JPS5732231B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • External Artificial Organs (AREA)
JP10137476A 1976-08-25 1976-08-25 Vermiculation system pump Granted JPS5327103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10137476A JPS5327103A (en) 1976-08-25 1976-08-25 Vermiculation system pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10137476A JPS5327103A (en) 1976-08-25 1976-08-25 Vermiculation system pump

Publications (2)

Publication Number Publication Date
JPS5327103A JPS5327103A (en) 1978-03-14
JPS5732231B2 true JPS5732231B2 (enrdf_load_html_response) 1982-07-09

Family

ID=14299026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10137476A Granted JPS5327103A (en) 1976-08-25 1976-08-25 Vermiculation system pump

Country Status (1)

Country Link
JP (1) JPS5327103A (enrdf_load_html_response)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449893A (en) * 1982-05-04 1984-05-22 The Abet Group Apparatus and method for piezoelectric pumping
US4432699A (en) * 1982-05-04 1984-02-21 The Abet Group Peristaltic piezoelectric pump with internal load sensor
JPS62247183A (ja) * 1986-04-17 1987-10-28 Nec Corp マイクロポンプ
US5317223A (en) * 1987-01-21 1994-05-31 Dynamotive Corporation Method and device in magnetostrictive motion systems
JPH024382A (ja) * 1988-06-23 1990-01-09 Teru Hayashi 送液ポンプ
US6538873B1 (en) * 1999-11-02 2003-03-25 Varian Semiconductor Equipment Associates, Inc. Active electrostatic seal and electrostatic vacuum pump
US6362946B1 (en) 1999-11-02 2002-03-26 Varian Semiconductor Equipment Associates, Inc. Electrostatic wafer clamp having electrostatic seal for retaining gas

Also Published As

Publication number Publication date
JPS5327103A (en) 1978-03-14

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