JPS5327103A - Vermiculation system pump - Google Patents
Vermiculation system pumpInfo
- Publication number
- JPS5327103A JPS5327103A JP10137476A JP10137476A JPS5327103A JP S5327103 A JPS5327103 A JP S5327103A JP 10137476 A JP10137476 A JP 10137476A JP 10137476 A JP10137476 A JP 10137476A JP S5327103 A JPS5327103 A JP S5327103A
- Authority
- JP
- Japan
- Prior art keywords
- vermiculation
- system pump
- long term
- fluid delivery
- control fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
- External Artificial Organs (AREA)
Abstract
PURPOSE: To ensure continuous use for a long term without possessing mechanical arrangement parts, and to easily control fluid delivery quantity.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10137476A JPS5327103A (en) | 1976-08-25 | 1976-08-25 | Vermiculation system pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10137476A JPS5327103A (en) | 1976-08-25 | 1976-08-25 | Vermiculation system pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5327103A true JPS5327103A (en) | 1978-03-14 |
JPS5732231B2 JPS5732231B2 (en) | 1982-07-09 |
Family
ID=14299026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10137476A Granted JPS5327103A (en) | 1976-08-25 | 1976-08-25 | Vermiculation system pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5327103A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4432699A (en) * | 1982-05-04 | 1984-02-21 | The Abet Group | Peristaltic piezoelectric pump with internal load sensor |
US4449893A (en) * | 1982-05-04 | 1984-05-22 | The Abet Group | Apparatus and method for piezoelectric pumping |
JPS62247183A (en) * | 1986-04-17 | 1987-10-28 | Nec Corp | Micro-pump |
JPH024382A (en) * | 1988-06-23 | 1990-01-09 | Teru Hayashi | Liquid sending pump |
US5317223A (en) * | 1987-01-21 | 1994-05-31 | Dynamotive Corporation | Method and device in magnetostrictive motion systems |
WO2001033078A1 (en) * | 1999-11-02 | 2001-05-10 | Varian Semiconductor Equipment Associates, Inc. | Active electrostatic seal and electrostatic vacuum pump |
US6362946B1 (en) | 1999-11-02 | 2002-03-26 | Varian Semiconductor Equipment Associates, Inc. | Electrostatic wafer clamp having electrostatic seal for retaining gas |
-
1976
- 1976-08-25 JP JP10137476A patent/JPS5327103A/en active Granted
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4432699A (en) * | 1982-05-04 | 1984-02-21 | The Abet Group | Peristaltic piezoelectric pump with internal load sensor |
US4449893A (en) * | 1982-05-04 | 1984-05-22 | The Abet Group | Apparatus and method for piezoelectric pumping |
JPS62247183A (en) * | 1986-04-17 | 1987-10-28 | Nec Corp | Micro-pump |
US5317223A (en) * | 1987-01-21 | 1994-05-31 | Dynamotive Corporation | Method and device in magnetostrictive motion systems |
JPH024382A (en) * | 1988-06-23 | 1990-01-09 | Teru Hayashi | Liquid sending pump |
WO2001033078A1 (en) * | 1999-11-02 | 2001-05-10 | Varian Semiconductor Equipment Associates, Inc. | Active electrostatic seal and electrostatic vacuum pump |
US6362946B1 (en) | 1999-11-02 | 2002-03-26 | Varian Semiconductor Equipment Associates, Inc. | Electrostatic wafer clamp having electrostatic seal for retaining gas |
US6538873B1 (en) | 1999-11-02 | 2003-03-25 | Varian Semiconductor Equipment Associates, Inc. | Active electrostatic seal and electrostatic vacuum pump |
JP2003514174A (en) * | 1999-11-02 | 2003-04-15 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | Active electrostatic seals and vacuum pumps |
JP4827156B2 (en) * | 1999-11-02 | 2011-11-30 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | Active electrostatic seal and electrostatic vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
JPS5732231B2 (en) | 1982-07-09 |
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