JPS5731107A - Method of producing tantalum thin film resistor - Google Patents

Method of producing tantalum thin film resistor

Info

Publication number
JPS5731107A
JPS5731107A JP10658080A JP10658080A JPS5731107A JP S5731107 A JPS5731107 A JP S5731107A JP 10658080 A JP10658080 A JP 10658080A JP 10658080 A JP10658080 A JP 10658080A JP S5731107 A JPS5731107 A JP S5731107A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
tantalum thin
producing tantalum
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10658080A
Other languages
Japanese (ja)
Inventor
Yasushi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP10658080A priority Critical patent/JPS5731107A/en
Publication of JPS5731107A publication Critical patent/JPS5731107A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP10658080A 1980-08-01 1980-08-01 Method of producing tantalum thin film resistor Pending JPS5731107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10658080A JPS5731107A (en) 1980-08-01 1980-08-01 Method of producing tantalum thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10658080A JPS5731107A (en) 1980-08-01 1980-08-01 Method of producing tantalum thin film resistor

Publications (1)

Publication Number Publication Date
JPS5731107A true JPS5731107A (en) 1982-02-19

Family

ID=14437149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10658080A Pending JPS5731107A (en) 1980-08-01 1980-08-01 Method of producing tantalum thin film resistor

Country Status (1)

Country Link
JP (1) JPS5731107A (en)

Similar Documents

Publication Publication Date Title
JPS56157358A (en) Method of forming multilayer film
JPS57156032A (en) Method of forming thin film
JPS5648102A (en) Method of manufacturing thin film resistor
JPS5780708A (en) Method of producing thick film resistor
JPS57102343A (en) Method of forming film
JPS5728305A (en) Method of producing tantalum thin film resistor
JPS5731107A (en) Method of producing tantalum thin film resistor
JPS57117204A (en) Method of forming thick film resistor
JPS54142564A (en) Method of producing thin film resistance
JPS57124884A (en) Method of producing thin film el element
JPS57173909A (en) Method of producing thin film resistor
JPS5769706A (en) Method of producing thin film resistor
JPS56125806A (en) Method of producing thin film varistor
JPS577103A (en) Method of manufacturing thin film resistor
JPS57121201A (en) Method of trimming metal thin film resistor
JPS57172702A (en) Method of producing thin film resistor
JPS57134901A (en) Method of producing thin film resistor
JPS5664405A (en) Method of manufacturing thin film resistor
JPS56138902A (en) Method of trimming thin film resistor
JPS57210611A (en) Method of trimming film resistor
JPS56155506A (en) Method of manufacturing thin film resistor
JPS574102A (en) Method of manufacturing thin film resistor
JPS577102A (en) Method of manufacturing thin film resistor
JPS5739501A (en) Thin film resistor and method of producing same
JPS57117205A (en) Method of forming thick film resistor